Ultra-low defect part process von Plano, Mary Anne, Latchford, Ian Scot

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ULTRA-LOW DEFECT PART PROCESS von PLANO MARY ANNE, LATCHFORD IAN SCOT

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SYSTEM DESIGN FOR IN-LINE PARTICLE AND CONTAMINATION METROLOGY FOR SHOWERHEAD AND ELECTRODE PARTS von MARY ANNE PLANO, BHASKAR SOMPALLI, IAN SCOT LATCHFORD

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SYSTEM DESIGN FOR IN-LINE PARTICLE AND CONTAMINATION METROLOGY FOR SHOWERHEAD AND ELECTRODE PARTS von PLANO MARY ANNE, SOMPALLI BHASKAR, LATCHFORD IAN SCOT

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Selective refractory metal and nitride capping von PLANO, MARY ANNE, HAVEMANN, ROBERT H, DRAEGER, NERISSA, SUNG, JUNGWAN, FAIR, JAMES A, LEE, SANG-HYEOB

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Selective refractory metal and nitride capping von Fair, James A, Havemann, Robert H, Sung, Jungwan, Taylor, Nerissa, Lee, Sang-Hyeob, Plano, Mary Anne

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CVD diamond material for radiation detector and process for making same von PLANO MARY ANNE, LANDSTRASS MAURICE I

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Selective refractory metal and nitride capping von TAYLOR NERISSA, PLANO MARY ANNE, HAVEMANN ROBERT H, FAIR JAMES A, LEE SANG-HYEOB, SUNG JUNGWAN

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Method of minimizing reactive ion etch damage of organic insulating layers in semiconductor fabrication von PLANO MARY ANNE, MOUNTSIER THOMAS W, SHI JIANOU, LAIA JOSEPH R

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