Plasma dicing with blade saw patterned underside mask von Lapke Martin, Buenning Hartmut, Moeller Sascha, Albermann Guido, Rohleder Thomas

Volltext bestellen

Plasma etching and stealth dicing laser process von Lapke Martin, Moeller Sascha, Buenning Hartmut, Albermann Guido, Rohleder Thomas

Volltext bestellen

Active plasma resonance spectroscopy: A functional analytic description von Lapke, Martin, Oberrath, Jens, Mussenbrock, Thomas, Brinkmann, Ralf Peter

Volltext

WAFER MATERIAL REMOVAL von BUENNING, HARTMUT, ROHLEDER, THOMAS, ALBERMANN, GUIDO, LAPKE, MARTIN, MOELLER, SASCHA

Volltext bestellen

COMBINATION GRINDING AFTER LASER (GAL) AND LASER ON-OFF FUNCTION TO INCREASE DIE STRENGTH von BUENNING HARTMUT, ALBERMANN GUIDO, LAPKE MARTIN, ROHLEDER THOMAS, MOELLER SASCHA

Volltext bestellen

High die strength semiconductor wafer processing method and system von BUENNING HARTMUT, ALBERMANN GUIDO, LAPKE MARTIN, ROHLEDER THOMAS, MOELLER SASCHA

Volltext bestellen

HIGH DIE STRENGTH SEMICONDUCTOR WAFER PROCESSING METHOD AND SYSTEM von BUENNING HARTMUT, ALBERMANN GUIDO, LAPKE MARTIN, ROHLEDER THOMAS, MOELLER SASCHA

Volltext bestellen

APPARATUS, DEVICE AND METHOD FOR WAFER DICING von BUENNING HARTMUT, ALBERMANN GUIDO, BACKER HEIKO, LAPKE MARTIN, ROHLEDER THOMAS, MOELLER SASCHA

Volltext bestellen

The multipole resonance probe: Investigation of an active plasma resonance probe using 3D-electromagnetic field simulations von Schulz, C., Rolfes, I., Styrnoll, T., Awakowicz, P., Lapke, M., Oberrath, J., Mussenbrock, T., Brinkmann, R. P., Storch, R., Musch, T.

Volltext bestellen

Device and use of the device for measuring the density and/or the electron temperature and/or the collision frequency of a plasma von AWAKOWICZ PETER, MUSCH THOMAS, MUSSENBROCK THOMAS, SCHULZ CHRISTIAN, ZIETZ CHRISTIAN, OBERRATH JENS, ROLFES ILONA, LAPKE MARTIN, STORCH ROBERT, STYRNOLL TIM, BRINKMANN RALF PETER

Volltext bestellen

DEVICE AND USE OF THE DEVICE FOR MEASURING THE DENSITY AND/OR THE ELECTRON TEMPERATURE AND/OR THE COLLISION FREQUENCY OF A PLASMA von AWAKOWICZ PETER, MUSCH THOMAS, MUSSENBROCK THOMAS, SCHULZ CHRISTIAN, ZIETZ CHRISTIAN, OBERRATH JENS, ROLFES ILONA, LAPKE MARTIN, STORCH ROBERT, STYRNOLL TIM, BRINKMANN RALF PETER

Volltext bestellen

High die strength semiconductor wafer processing method and system von GUIDO ALBERMANN, THOMAS ROHLEDER, HARTMUT BUENNING, MARTIN LAPKE, SASCHA MOELLER

Volltext bestellen

DEVICE AND USE OF THE DEVICE FOR MEASURING THE DENSITY AND/OR THE ELECTRON TEMPERATURE AND/OR THE COLLISION FREQUENCY OF A PLASMA von MUSCH, THOMAS, LAPKE, MARTIN, ROLFES, ILONA, OBERRATH, JENS, AWAKOWICZ, PETER, STYRNOLL, TIM, STORCH, ROBERT, SCHULZ, CHRISTIAN, ZIETZ, CHRISTIAN, BRINKMANN, RALF, PETER, MUSSENBROCK, THOMAS

Volltext bestellen

DEVICE AND USE OF THE DEVICE FOR MEASURING THE DENSITY AND/OR THE ELECTRON TEMPERATURE AND/OR THE COLLISION FREQUENCY OF A PLASMA von MUSCH, THOMAS, LAPKE, MARTIN, ROLFES, ILONA, OBERRATH, JENS, AWAKOWICZ, PETER, STYRNOLL, TIM, STORCH, ROBERT, SCHULZ, CHRISTIAN, ZIETZ, CHRISTIAN, BRINKMANN, RALF, PETER, MUSSENBROCK, THOMAS

Volltext bestellen

Effects of icosapent ethyl according to baseline residual risk in patients with atherosclerotic cardiovascular disease: results from REDUCE-IT von Burger, Pascal M, Bhatt, Deepak L, Dorresteijn, Jannick A N, Koudstaal, Stefan, Mosterd, Arend, Martens, Fabrice M A C, Steg, Philippe Gabriel, Visseren, Frank L J

Volltext