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  1. 1
    Transfer apparatus for transferring an object, lithographic apparatus employing such a transfer apparatus, and method of use thereof

    Transfer apparatus for transferring an object, lithographic apparatus employing such a transfer apparatus, and method of use thereof von Willems Van Dijk, Marcus Johannes Henricus, Hennus, Pieter Renaat Maria

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  2. 2
    Transfer apparatus for transferring an object, lithographic apparatus employing such a transfer apparatus, and method of use thereof

    Transfer apparatus for transferring an object, lithographic apparatus employing such a transfer apparatus, and method of use thereof von HENNUS PIETER RENAAT MARIA, WILLEMS VAN DIJK MARCUS JOHANNES HENRICUS

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  3. 3
    Transfer apparatus for transferring an object and method of use thereof and lithographic projection apparatus comprising such a transfer apparatus

    Transfer apparatus for transferring an object and method of use thereof and lithographic projection apparatus comprising such a transfer apparatus von HENNUS, PIETER RENAAT MARIA, WILLEMS VAN DIJK, MARCUS JOHANNES HENRICUS

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  4. 4
    LINEAR GUIDE ARRANGEMENT, DEVICE COMPRISING A LINEAR GUIDE ARRANGEMENT AND A HEAD FOR READING AND/OR WRITING INFORMATION FROM/ON A MEDIUM, AND INFORMATION REPRODUCING AND/OR RECORDING APPARATUS COMPRISING A LINEAR GUIDE ARRANGEMENT

    LINEAR GUIDE ARRANGEMENT, DEVICE COMPRISING A LINEAR GUIDE ARRANGEMENT AND A HEAD FOR READING AND/OR WRITING INFORMATION FROM/ON A MEDIUM, AND INFORMATION REPRODUCING AND/OR RECORD... von WILLEMS VAN DIJK, MARCUS, JOHANNES, HENRICUS

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  5. 5
    Transfer apparatus for transferring an object, lithographic apparatus employing such a transfer apparatus, and method of use thereof

    Transfer apparatus for transferring an object, lithographic apparatus employing such a transfer apparatus, and method of use thereof von HENNUS PIETER RENAAT MARIA, WILLEMS VAN DIJK MARCUS JOHANNES HENRICUS

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  6. 6
    LINEAR GUIDE ARRANGEMENT, DEVICE COMPRISING A LINEAR GUIDE ARRANGEMENT AND A HEAD FOR READING AND/OR WRITING INFORMATION FROM/ON A MEDIUM, AND INFORMATION REPRODUCING AND/OR RECORDING APPARATUS COMPRISING A LINEAR GUIDE ARRANGEMENT

    LINEAR GUIDE ARRANGEMENT, DEVICE COMPRISING A LINEAR GUIDE ARRANGEMENT AND A HEAD FOR READING AND/OR WRITING INFORMATION FROM/ON A MEDIUM, AND INFORMATION REPRODUCING AND/OR RECORD... von WILLEMS VAN DIJK, MARCUS, JOHANNES, HENRICUS

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  7. 7
    LINEAR GUIDE ARRANGEMENT, DEVICE COMPRISING A LINEAR GUIDE ARRANGEMENT AND A HEAD FOR READING AND/OR WRITING INFORMATION FROM/ON A MEDIUM, AND INFORMATION REPRODUCING AND/OR RECORDING APPARATUS COMPRISING A LINEAR GUIDE ARRANGEMENT

    LINEAR GUIDE ARRANGEMENT, DEVICE COMPRISING A LINEAR GUIDE ARRANGEMENT AND A HEAD FOR READING AND/OR WRITING INFORMATION FROM/ON A MEDIUM, AND INFORMATION REPRODUCING AND/OR RECORD... von WILLEMS VAN DIJK, MARCUS, JOHANNES, HENRICUS

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  8. 8
    Method of positioning a substrate in a lithographic projection apparatus

    Method of positioning a substrate in a lithographic projection apparatus von VAN DE PASCH, ENGELBERTUS ANTONIUS FRANCISCUS, WILLEMS VAN DIJK, MARCUS JOHANNES HENRICUS, ARIENS, ANDREAS BERNARDUS GERARDUS, CASTENMILLER, THOMAS JOSEPHUS MARIA

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  9. 9
    OPTICAL SCANNING UNIT HAVING A MAIN LENS AND AN AUXILIARY LENS

    OPTICAL SCANNING UNIT HAVING A MAIN LENS AND AN AUXILIARY LENS von WILLEMS VAN DIJK, MARCUS, JOHANNES, HENRICUS, VAN ROSMALEN, GERARD, EDUARD

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  10. 10
    OPTICAL SCANNING UNIT HAVING A MAIN LENS AND AN AUXILIARY LENS

    OPTICAL SCANNING UNIT HAVING A MAIN LENS AND AN AUXILIARY LENS von WILLEMS VAN DIJK, MARCUS, JOHANNES, HENRICUS, VAN ROSMALEN, GERARD, EDUARD

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  11. 11
    Object positioning method for a lithographic projection apparatus

    Object positioning method for a lithographic projection apparatus von WILLEMS VAN DIJK, MARCUS JOHANNES HENRICUS, VAN DE PASCH, ENGELBERTUS ANTONIUS FRANSISCUS, ARIENS, ANDERAS BERNARDUS GERARDUS, CASTENMILLER, THOMAS JOSEPHUS MARIA

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  12. 12
    Method of positioning an object in a lithographic projection apparatus

    Method of positioning an object in a lithographic projection apparatus von VAN DE PASCH, ENGELBERTUS ANTONIUS FRANCISCUS, WILLEMS VAN DIJK, MARCUS JOHANNES HENRICUS, ARIENS, ANDREAS BERNARDUS GERARDUS, CASTENMILLER, THOMAS JOSEPHUS MARIA

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  13. 13
    Linear translation movement with limited range

    Linear translation movement with limited range von JOHANNIS WILLEM VAN VLIET, MARCUS JOHANNES HENRICUS WILLEMS VAN DIJK, JAN PETER BAARTMAN

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  14. 14
    Transfer apparatus for transferring an object and method of use thereof and lithographic projection apparatus comprising such a transfer apparatus

    Transfer apparatus for transferring an object and method of use thereof and lithographic projection apparatus comprising such a transfer apparatus von HENNUS, PIETER RENAAT MARIA, WILLEMS VAN DIJK, MARCUS JOHANNES HENRICUS

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  15. 15
    Method of positioning a substrate in a lithographic projection apparatus

    Method of positioning a substrate in a lithographic projection apparatus von VAN DE PASCH, ENGELBERTUS ANTONIUS FRANCISCUS, WILLEMS VAN DIJK, MARCUS JOHANNES HENRICUS, ARIENS, ANDREAS BERNARDUS GERARDUS, CASTENMILLER, THOMAS JOSEPHUS MARIA

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