Recombination of O and H Atoms on the Surface of Nanoporous Dielectrics von Rakhimova, T.V., Braginsky, O.V., Kovalev, A.S., Lopaev, D.V., Mankelevich, Y.A., Malykhin, E.M., Rakhimov, A.T., Vasilieva, A.N., Zyryanov, S.M., Baklanov, M.R.

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Recombination of O and H Atoms on the Surface of Nanoporous Dielectrics: Special Issue on Advances on Plasma Processing for Semiconductor Manufacturing von RAKHIMOVA, Tatyana V, BRAGINSKY, Oleg V, KOVALEV, Alexander S, LOPAEV, Dmitry V, MANKELEVICH, Yuri A, MALYKHIN, Evdokim M, RAKHIMOV, Alexander T, VASILIEVA, Anna N, ZYRYANOV, Sergey M, BAKLANOV, Mikhail R

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