DEVICE FOR AUTOMATIC INSPECTION OF LARGE INTEGRATED CIRCUITS von MALSHIN ALEKSANDR V,SU, KARE YULIJ A,SU, MAKSIMOV SERGEJ A,SU, REJNBERG MIKHAIL G,SU, KRASNOVA LYUDMILA S,SU, METELKINA MARGARITA G,SU, YAROSLAVTSEV OLEG I,SU, BURGASOV MIKHAIL A,SU, CHUNAEV VALENTIN S,SU, PESHKOV MIKHAIL V,SU

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