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  1. 1
    Method for making a planar suspended microstructure, using a sacrificial layer of polymer material and resulting component

    Method for making a planar suspended microstructure, using a sacrificial layer of polymer material and resulting component von SILLON NICOLAS, MICHEL FRANCE, MAEDER-PACHURKA CATHERINE, ROBERT PHILIPPE

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  2. 2
    METHOD FOR MAKING A PLANAR SUSPENDED MICROSTRUCTURE, USING A SACRIFICIAL LAYER OF POLYMER MATERIAL AND RESULTING COMPONENT

    METHOD FOR MAKING A PLANAR SUSPENDED MICROSTRUCTURE, USING A SACRIFICIAL LAYER OF POLYMER MATERIAL AND RESULTING COMPONENT von ROBERT, PHILIPPE, MICHEL, FRANCE, SILLON, NICOLAS, MAEDER-PACHURKA, CATHERINE

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  3. 3
    METHOD FOR MAKING A PLANAR SUSPENDED MICROSTRUCTURE, USING A SACRIFICIAL LAYER OF POLYMER MATERIAL AND RESULTING COMPONENT

    METHOD FOR MAKING A PLANAR SUSPENDED MICROSTRUCTURE, USING A SACRIFICIAL LAYER OF POLYMER MATERIAL AND RESULTING COMPONENT von CATHERINE MAEDER-PACHURKA, FRANCE MICHEL, NICOLAS SILLON, PHILIPPE ROBERT

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  4. 4
    Flat suspended micro-structure production for micro electro-mechanical systems, includes deposition of sacrificial polymer layer

    Flat suspended micro-structure production for micro electro-mechanical systems, includes deposition of sacrificial polymer layer von SILLON NICOLAS, MICHEL FRANCE, ROBERT PHILIPPE, MAEDER PACHURKA CATHERINE

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  5. 5
    PROCEDE DE REALISATION D'UNE MICRO-STRUCTURE SUSPENDUE PLANE, UTILISANT UNE COUCHE SACRIFICIELLE EN MATERIAU POLYMERE ET COMPOSANT OBTENU

    PROCEDE DE REALISATION D'UNE MICRO-STRUCTURE SUSPENDUE PLANE, UTILISANT UNE COUCHE SACRIFICIELLE EN MATERIAU POLYMERE ET COMPOSANT OBTENU von SILLON NICOLAS, MICHEL FRANCE, ROBERT PHILIPPE, MAEDER PACHURKA CATHERINE

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  6. 6
    METHOD FOR MAKING A PLANAR SUSPENDED MICROSTRUCTURE, USING A SACRIFICIAL LAYER OF POLYMER MATERIAL AND RESULTING COMPONENT

    METHOD FOR MAKING A PLANAR SUSPENDED MICROSTRUCTURE, USING A SACRIFICIAL LAYER OF POLYMER MATERIAL AND RESULTING COMPONENT von ROBERT, PHILIPPE, MICHEL, FRANCE, SILLON, NICOLAS, MAEDER-PACHURKA, CATHERINE

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  7. 7
    METHOD FOR MAKING A PLANAR SUSPENDED MICROSTRUCTURE, USING A SACRIFICIAL LAYER OF POLYMER MATERIAL AND RESULTING COMPONENT

    METHOD FOR MAKING A PLANAR SUSPENDED MICROSTRUCTURE, USING A SACRIFICIAL LAYER OF POLYMER MATERIAL AND RESULTING COMPONENT von ROBERT, PHILIPPE, MICHEL, FRANCE, SILLON, NICOLAS, MAEDER-PACHURKA, CATHERINE

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