SiO2 sputtering by low-energy Ar+, Kr+, and Xe+ ions in plasma conditions von Shibanov, D.R., Lopaev, D.V., Maslakov, K.I., Konnikova, M.R., Rakhimov, A.T.

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N2 dissociation and kinetics of N(4S) atoms in nitrogen DC glow discharge von Volynets, A V, Lopaev, D V, Rakhimova, T V, Chukalovsky, A A, Mankelevich, Yu A, Popov, N A, Zotovich, A I, Rakhimov, A T

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Impact of VUV photons on SiO2 and organosilicate low-k dielectrics: General behavior, practical applications, and atomic models von Baklanov, M.R, Jousseaume, V, Rakhimova, T.V, Lopaev, D.V, Mankelevich, Y.A, Afanas'Ev, V.V, Shohet, J.L, King, S.W, Ryan, E.T

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Experimental and Theoretical Study of Ion Energy Distribution Function in Single and Dual Frequency RF Discharges von Rakhimova, T.V., Braginsky, O.V., Ivanov, V.V., Kovalev, A.S., Lopaev, D.V., Mankelevich, Y.A., Olevanov, M.A., Proshina, O.V., Rakhimov, A.T., Vasilieva, A.N., Voloshin, D.G.

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Recombination of O and H Atoms on the Surface of Nanoporous Dielectrics von Rakhimova, T.V., Braginsky, O.V., Kovalev, A.S., Lopaev, D.V., Mankelevich, Y.A., Malykhin, E.M., Rakhimov, A.T., Vasilieva, A.N., Zyryanov, S.M., Baklanov, M.R.

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Experimental and theoretical study of RF plasma at low and high frequency von Rakhimova, T.V., Braginsky, O.V., Ivanov, V.V., Kim, T.K., Kong, J.T., Kovalev, A.S., Lopaev, D.V., Mankelevich, Y.A., Proshina, O.V., Vasilieva, A.N.

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Diagnostics of heterogeneous processes with the participation of radicals by time-resolved actinometry von Lopaev, D. V., Smirnov, A. V.

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Experimental and Theoretical Studies of Radical Production in RF CCP Discharge at 81-MHz Frequency in \hbox and \hbox Mixtures von Rakhimova, T.V., Braginsky, O.V., Klopovskiy, K.S., Kovalev, A.S., Lopaev, D.V., Proshina, O.V., Rakhimov, A.T., Shamiryan, D., Vasilieva, A.N., Voloshin, D.G.

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Dynamic chaos: Examination of classic and quantum systems from the general standpoint Phenomenon of “selective predictability” von Lopaev, D.V., Malykhin, E.M., Namiot, V.A.

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Experimental and theoretical investigation of oxygen glow discharge structure at low pressures von Ivanov, V.V., Klopovsky, K.S., Lopaev, D.V., Rakhimov, A.T., Rakhimova, T.V.

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Structure and dynamics of a pulsed DC discharge in pure oxygen von Ivanov, V.V., Klopovsky, K.S., Lopaev, D.V., Mankelevich, Y.A., Rakhimov, A.T., Rakhimova, T.V.

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On the possibility of using ‘dusty’ plasma for X-ray generation by ultra-relativistic electrons von Namiot, V.A, Lopaev, D.V

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Production of singlet oxygen in a non-self-sustained discharge von Vasil’eva, A. N., Klopovskii, K. S., Kovalev, A. S., Lopaev, D. V., Mankelevich, Yu. A., Popov, N. A., Rakhimov, A. T., Rakhimova, T. V.

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Low pressure RF discharge in electronegative gases for plasma processing von Feoktistov, V.A., Lopaev, D.V., Klopovsky, K.S., Popov, A.M., Popovicheva, O.B., Rakhimov, A.T., Rakhimova, T.V.

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