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  1. 1
    ALD of Hafnium Oxide Thin Films from Tetrakis(ethylmethylamino)hafnium and Ozone

    ALD of Hafnium Oxide Thin Films from Tetrakis(ethylmethylamino)hafnium and Ozone von Liu, Xinye, Ramanathan, Sasangan, Longdergan, Ana, Srivastava, Anuranjan, Lee, Eddie, Seidel, Thomas E., Barton, Jeffrey T., Pang, Dawen, Gordon, Roy G.


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  2. 2
    Erratum: ALD of Hafnium Oxide Thin Films from Tetrakis(ethylmethylamino)hafnium and Ozone [J. Electrochem. Soc., 152, G213 (2005)]

    Erratum: ALD of Hafnium Oxide Thin Films from Tetrakis(ethylmethylamino)hafnium and Ozone [J. Electrochem. Soc., 152, G213 (2005)] von Liu, Xinye, Ramanathan, Sasangan, Longdergan, Ana, Srivastava, Anuranjan, Lee, Eddie, Seidel, Thomas E., Barton, Jeffrey T., Pang, Dawen, Gordon, Roy G.


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