Nanoscale grating characterization using EUV scatterometry and soft x-ray scattering with plasma and synchrotron radiation von Lohr, Leonhard M, Ciesielski, Richard, Glabisch, Sven, Schröder, Sophia, Brose, Sascha, Soltwisch, Victor

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A new sample chamber for hybrid detection of scattering and fluorescence, using synchrotron radiation in the soft x-ray and extreme ultraviolet (EUV) spectral range von Ciesielski, Richard, Lohr, Leonhard M., Herrero, Analía Fernández, Fischer, Andreas, Grothe, Alexander, Mentzel, Heiko, Scholze, Frank, Soltwisch, Victor

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Hybrid approach to reconstruct nanoscale grating dimensions using scattering and fluorescence with soft X-rays von Lohr, Leonhard M, Ciesielski, Richard, Truong, Vinh-Binh, Soltwisch, Victor

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Dataset for Hybrid Approach to Reconstruct Nanoscale Grating Dimensions using Scattering and Fluorescence with Soft X-rays von Lohr, Leonhard M., Ciesielski, Richard, Truong, Vinh-Binh, Soltwisch, Victor

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Hybrid approach to reconstruct nanoscale grating dimensions using scattering and fluorescence with soft X-rays von Lohr, Leonhard M, Ciesielski, Richard, Vinh-Binh Truong, Soltwisch, Victor

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