Self-traceable angle standards with simplified traceability chain for dimensional metrology von Deng, Xiao, Shen, Junyu, Xiong, Yingfan, Gou, Jinming, Tang, Zhaohui, Xiao, Guangxu, Yin, Zhijun, Xue, Dongbai, Shi, Yushu, Shi, Zhoumiao, Xie, Yuying, Cheng, Xinbin, Li, Tongbao

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Sub-5 nm AFM Tip Characterizer Based on Multilayer Deposition Technology von Wu, Ziruo, Xiong, Yingfan, Lei, Lihua, Tan, Wen, Tang, Zhaohui, Deng, Xiao, Cheng, Xinbin, Li, Tongbao

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Displacement Determination of the Guard Electrode for the New Calculable Capacitor at NIM von Wang, Jianbo, Qian, Jin, Liu, Zhongyou, Lu, Zuliang, Yang, Yan, Huang, Lu, Yin, Cong, Cheng, Xinbin, Li, Tongbao

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Asymmetric line edge roughness of multilayer grating reference materials von Wang, Xingrui, Cheng, Xinbin, Zhang, Longfei, Deng, Xiao, Li, Tongbao

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Optimization of Nano-Grating Pitch Evaluation Method Based on Line Edge Roughness Analysis von Chen, Jie, Liu, Jie, Wang, Xingrui, Zhang, Longfei, Deng, Xiao, Cheng, Xinbin, Li, Tongbao

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Investigation of shadow effect in laser-focused atomic deposition von Deng, Xiao, Ma, Yan, Zhang, Pingping, Zhang, Wanjing, Chen, Sheng, Xiao, Shengwei, Li, Tongbao

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Rectangular multilayer dielectric gratings with broadband high diffraction efficiency and enhanced laser damage resistance von Xie, Lingyun, Zhang, Jinlong, Zhang, Zhanyi, Ma, Bin, Li, Tongbao, Wang, Zhanshan, Cheng, Xinbin

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Geometrical misalignment-induced nonlinear error in homodyne interferometers von Lin, Zichao, Feng, Jingtong, Wu, Yize, Zhu, Hongyu, Deng, Xiao, Dun, Xiong, Cheng, Xinbin, Duan, Lifeng, Li, Tongbao

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Calibrate the non-orthogonal error of AFM with two-dimensional self-traceable grating von Tan, Wen, Tang, Zhaohui, Xiao, Guangxu, Yao, Yulin, Lei, Lihua, Li, Qing, Jin, Tao, Deng, Xiao, Cheng, Xinbin, Li, Tongbao

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Shortened and simplified traceability chain for dimensional metrology based on self-traceable standards von Deng, Xiao, Yin, Zhijun, Dai, Gaoliang, Xiao, Guangxu, Tang, Zhaohui, Shen, Junyu, Zhou, Tong, Xue, Dongbai, Xie, Yuying, He, Chunling, Dun, Xiong, Xie, Lingyun, Cheng, Xinbin, Li, Tongbao

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A new type of nanoscale reference grating manufactured by combined laser-focused atomic deposition and x-ray interference lithography and its use for calibrating a scanning electro... von Deng, Xiao, Dai, Gaoliang, Liu, Jie, Hu, Xiukun, Bergmann, Detlef, Zhao, Jun, Tai, Renzhong, Cai, Xiaoyu, Li, Yuan, Li, Tongbao, Cheng, Xinbin

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Fabrication of 53.2 nm pitch self-traceable gratings by laser-focused atomic deposition combined with extreme ultraviolet interference lithography von Tang, Zhaohui, Zhao, Jun, Deng, Xiao, Tan, Wen, Wu, Yanqing, Tai, Renzhong, Cheng, Xinbin, Li, Tongbao

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Two-dimensional sub-200 nm pitch Si gratings with natural orthogonality von Tang, Zhaohui, Zhao, Jun, Deng, Xiao, Xiao, Guangxu, Yin, Zhijun, Wu, Yanqing, Tai, Renzhong, Cheng, Xinbin, Li, Tongbao

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Hybrid application of laser-focused atomic deposition and extreme ultraviolet interference lithography methods for manufacturing of self-traceable nanogratings von Liu, Jie, Zhao, Jun, Deng, Xiao, Yang, Shumin, Xue, Chaofan, Wu, Yanqing, Tai, Renzhong, Hu, Xiukun, Dai, Gaoliang, Li, Tongbao, Cheng, Xinbin

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Physical insight toward electric field enhancement at nodular defects in optical coatings von Cheng, Xinbin, Tuniyazi, Abudusalamu, Wei, Zeyong, Zhang, Jinlong, Ding, Tao, Jiao, Hongfei, Ma, Bin, Li, Hongqiang, Li, Tongbao, Wang, Zhanshan

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Optimization and fabrication of chromium grating in self-traceable interferometer von Lin, Zichao, Yao, Yulin, Xie, Zhangning, Xue, Dongbai, Zhou, Tong, Tang, Zhaohui, Lei, Lihua, Jin, Tao, Dun, Xiong, Deng, Xiao, Cheng, Xinbin, Li, Tongbao

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Natural square ruler at nanoscale von Deng, Xiao, Liu, Jie, Zhu, Li, He, Pengfei, Cheng, Xinbin, Li, Tongbao

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Influence of laser power on deposition of the chromium atomic beam in laser standing wave von Zhang, WenTao, Zhu, BaoHua, Zhang, BaoWu, Li, TongBao

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Vacuum frequency measurement of 7 S 3 - 7 P 4 transition in Cr atoms using laser-induced fluorescence von Zhou, Tong, Deng, Xiao, Yin, Zhijun, Xiao, Guangxu, Shen, Junyu, Sun, Lei, Ren, Fangsheng, Xue, Dongbai, Xie, Yuying, Yu, Jing, Kong, Ming, Wang, Jianbo, Yin, Cong, Cheng, Xinbin, Li, Tongbao

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Grating pitch comparator traceable to the Cr atom transition frequency von Lin, Zichao, Deng, Xiao, Wu, Yize, Feng, Jingtong, Zhu, Hongyu, Yang, Yaao, Yu, Jing, Xue, Dongbai, Wang, Jianbo, Shi, Yushu, Jin, Tao, Zhang, Wentao, Dun, Xiong, Cheng, Xinbin, Li, Tongbao

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