SYSTEM AND METHOD FOR DETECTING ANOMALIES WHEN CONNECTING DEVICES von Levinskij Mikhail Aleksandrovich, Domke Olga Eduardovna, Manurin Konstantin YUrevich, Zajtsev Oleg Vladimirovich

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METHOD OF PRODUCTION OF TRICHLOROSILANE BY PLASMA CHEMICAL HYDROGENATION OF SILICON TETRACHLORIDE AND DEVICE TO THIS END von REVENKO JURIJ ALEKSANDROVICH, MURAVITSKIJ STEPAN ALEKSANDROVICH, GROMOV GENNADIJ NIKOLAEVICH, PETRUSEVICH FEDOR VIKTOROVICH, GUSHCHIN VLADIMIR VASIL'EVICH, BOLGOV MIKHAIL VIKTOROVICH, GAVRILOV PETR MIKHAJLOVICH, LEVINSKIJ ALEKSANDR IVANOVICH

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METHOD OF REMOVAL OF POLYSILANE CHLORIDES FROM STEAM-GAS MIXTURE DISCHARGED FROM INSTALLATIONS OF HYDROGEN REDUCTION OF SILICON AND DEVICE FOR ITS REALISATION von REVENKO JURIJ ALEKSANDROVICH, MURAVITSKIJ STEPAN ALEKSANDROVICH, GROMOV GENNADIJ NIKOLAEVICH, PETRUSEVICH FEDOR VIKTOROVICH, GUSHCHIN VLADIMIR VASIL'EVICH, BOLGOV MIKHAIL VIKTOROVICH, GAVRILOV PETR MIKHAJLOVICH, LEVINSKIJ ALEKSANDR IVANOVICH

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POLYCRYSTALLINE SILICON PROCESS von REVENKO JURIJ ALEKSANDROVICH, MURAVITSKIJ STEPAN ALEKSANDROVICH, GROMOV GENNADIJ NIKOLAEVICH, GUSHCHIN VLADIMIR VASIL'EVICH, PROCHANKIN ALEKSANDR PETROVICH, BOLGOV MIKHAIL VIKTOROVICH, GAVRILOV PETR MIKHAJLOVICH, LEVINSKIJ ALEKSANDR IVANOVICH

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