Approach for a Standardized Methodology for Multisite Processing of 300-mm Wafers at R&D Sites von Oechsner, R., Pfeffer, M., Frickinger, J., Schellenberger, M., Roeder, G., Pfitzner, L., Ryssel, H., Fritzsche, M., Kaushik, V., Renaud, D., Danel, A., Claeys, C., Bearda, T., Lering, M., Graef, M., Murphy, B., Walther, H., Hury, S.

Volltext

Approach for a Standardized Methodology for Multisite Processing of 300-mm Wafers at R & D Sites von Oechsner, R, Pfeffer, M, Frickinger, J, Schellenberger, M, Roeder, G, Pfitzner, L, Ryssel, H, Fritzsche, M, Kaushik, V, Renaud, D, Danel, A, Claeys, C, Bearda, T, Lering, M, Graef, M, Murphy, B, Walther, H, Hury, S

Volltext

Approach for a Standardized Methodology for Multi-Site Processing of 300mm Wafers at R&D-Sites von Oechsner, R., Frickinger, J., Pfeffer, M., Schellenberger, M., Roeder, G., Pfitzner, L., Ryssel, H., Fritzsche, M., Kaushik, V., Renaud, D., Danel, A., Claeys, C., Bearda, T., Lering, M., Graef, M., Murphy, B., Walther, H., Hury, S.

Volltext

FLYING WAFER - A STANDARDISED METHODOLOGY FOR MULTI-SITE PROCESSING OF 300 MM WAFERS AT R&D-SITES von Frickinger, J., Oechsner, R., Schellenberger, M., Pfeffer, M., Pfitzner, L., Ryssel, H., Claeys, C., Claes, M., Bearda, T., Renaud, D., Danel, A., Lering, M., Graef, M., Kaushik, V., Murphy, B., Fritzsche, M., Walther, H., Hury, S.

Volltext