Ultralow‐k Amorphous Boron Nitride Based on Hexagonal Ring Stacking Framework for 300 mm Silicon Technology Platform von Lin, Cheng‐Ming, Hsu, Chuang‐Han, Huang, Wei‐Yu, Astié, Vincent, Cheng, Po‐Hsien, Lin, Yue‐Min, Hu, Wei‐Shan, Chen, Szu‐Hua, Lin, Han‐Yu, Li, Ming‐Yang, Magyari‐Kope, Blanka, Yang, Chi‐Ming, Decams, Jean‐Manuel, Lee, Tzu‐Lih, Gui, Dong, Wang, Han, Woon, Wei‐Yen, Lin, Pinyen, Wu, Jeff, Lee, Jang‐Jung, Liao, Szuya Sandy, Cao, Min

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