Micromachining of quartz plates: determination of a database by combined stereographic analysis and 3-D simulation of etching shapes von Tellier, C.R., Leblois, T.G.

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On the design of GaAs (hhl) resonant cantilevers von Tellier, C.R, Leblois, T.G.

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Micromachined resonant temperature sensors: theoretical and experimental results von Leblois, T.G., Tellier, C.R.

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On the design of GaAs (hhl) resonant cantilevers: Study of piezoelectric excitation, of piezoresistive sensing and of micromachined structure von Tellier, C R, Leblois, T G

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Micromachining of GaAs structures with an acidic hydrogen peroxide solution von Tellier, C.R., Huve, G., Leblois, T.G.

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Micromachining of GaAs structures with an acidic hydrogen peroxide solution Experimental and theoretical 3D etching shapes von Tellier, C R, Huve, G, Leblois, T G

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Some investigations on doubly-rotated quartz resonant temperature sensors von Leblois, T.G., Tellier, C.R.

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P2O-6 Design of GaAs Resonant Micro-Beams von Leblois, T.G., Tellier, C.R.

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LGS as a crystal for MEMS. Micromachining in HCl∶H2O. Anisotropy, database and simulations von Tellier, C.R., Akil, M., Leblois, T.G.

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A Database For The Etching of LGS in H2SO4: H2O von Tellier, C.R., Akil, M., Leblois, T.G.

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P2O-9 Wet Etching of LGS crystals in H3PO4:H2O - Characterization of Anisotropy and Simulation von Tellier, C.R., Akil, M., Leblois, T.G.

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Some applications of a stereographic analysis of etching shapes for structures micromachined in singly and doubly rotated quartz plates von Tellier, C.R., Leblois, T.G.

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Quartz resonant micro-structures as sensing elements for temperature sensors von Leblois, T.G., Tellier, C.R.

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Bi- and three-dimensional prediction of etching shapes in quartz micromachined structures von Tellier, C.R., Leblois, T.G.

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Contribution of a 3D numerical simulation to the design of micro-machined quartz microstructures von Tellier, C.R, Messaoudi, T, Leblois, T.G

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