Treffer 1 - 4 von 4 für Suche 'Lau, Kia Hian', Suchdauer: 0,37s Treffer weiter einschränken
  1. 1
    Releasing high aspect ratio SU-8 microstructures using AZ photoresist as a sacrificial layer on metallized Si substrates

    Releasing high aspect ratio SU-8 microstructures using AZ photoresist as a sacrificial layer on metallized Si substrates von Lau, Kia Hian, Giridhar, Archit, Harikrishnan, Sekar, Satyanarayana, Nalam, Sinha, Sujeet K.


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  2. 2
    AlN Actuator for Tunable RFMEMS Capacitor

    AlN Actuator for Tunable RFMEMS Capacitor von Lau, Kia Hian, Fernando, Sanchitha, Khine, Lynn, Agarwal, Rahul, Min, Tang, Soon, Jeffrey B.W., Tsai, Ming Lin Julius


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  3. 3
    Three-Axis Capacitive SOI Accelerometer Using Combination of In-Plane and Vertical Comb Electrodes

    Three-Axis Capacitive SOI Accelerometer Using Combination of In-Plane and Vertical Comb Electrodes von Agarwal, Rahul, Xie, Jin, Liu, You He, Lau, Kia Hian, Tsai, Ming Lin Julius


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  4. 4
    Challenges and Solutions for Fabricating Isolation Trenches for High Aspect Ratio Sensors

    Challenges and Solutions for Fabricating Isolation Trenches for High Aspect Ratio Sensors von Xie, Jin, Singh, Janak, Lau, Kia Hian, Ranganathan, Nagarajan, Agarwal, Rahul, Tsai, Ming Lin Julius, Sampath, Praveen Kumar


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