Evolution of tungsten film deposition induced by focused ion beam von Langfischer, H., Basnar, B., Hutter, H., Bertagnolli, E.

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Simulation of ion beam direct structuring for 3D nanoimprint template fabrication von Platzgummer, E., Biedermann, A., Langfischer, H., Eder-Kapl, S., Kuemmel, M., Cernusca, S., Loeschner, H., Lehrer, C., Frey, L., Lugstein, A., Bertagnolli, E.

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Focused ion beam prepared contacts of tungsten to silicon characterized by a cross-bridge Kelvin resistor approach von Langfischer, H., Bertagnolli, E.

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Focused ion beam induced surface amorphization and sputter processes von Basnar, B., Lugstein, A., Wanzenboeck, H., Langfischer, H., Bertagnolli, E., Gornik, E.

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Ion beam induced deposition of dielectric nanostructures von Wanzenboeck, H.D, Lugstein, A, Langdischer, H, Bertagnolli, E, Gritsch, M, Hutter, H

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Versatile Nanodeposition of Dielectrics and Metals by Non-Contact Direct-Write Technology von Wanzenboeck, H D, Langfischer, H, Harasek, S, Basnar, B, Hutter, H

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