Silicon MEMS inertial sensors evolution over a quarter century von Langfelder, G, Bestetti, M, Gadola, M

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Sensitivity and temperature behavior of a novel z-axis differential resonant micro accelerometer von Comi, C, Corigliano, A, Langfelder, G, Zega, V, Zerbini, S

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Torsional MEMS magnetometer operated off-resonance for in-plane magnetic field detection von Laghi, G., Dellea, S., Longoni, A., Minotti, P., Tocchio, A., Zerbini, S., Langfelder, G.

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Design of a fully CMOS compatible 3-μm size color pixel von Langfelder, G.

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Isolation of Highly Doped Implants on Low-Doped Active Layers for CMOS Radiation Drift Detectors von Langfelder, G.

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Dynamic nonlinear behavior of torsional resonators in MEMS von Caspani, A, Comi, C, Corigliano, A, Langfelder, G, Zega, V, Zerbini, S

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Sidewall Adhesion Evolution in Epitaxial Polysilicon as a Function of Impact Kinetic Energy and Stopper Area von Dellea, S., Ardito, R., De Masi, B., Tocchio, A., Rizzini, F., Langfelder, G.

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The Transverse Field Detector (TFD): A Novel Color-Sensitive CMOS Device von Longoni, A., Zaraga, F., Langfelder, G., Bombelli, L.

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Tunable Spectral Responses in a Color-Sensitive CMOS Pixel for Imaging Applications von Langfelder, G., Zaraga, F., Longoni, A.

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Readout of MEMS capacitive sensors beyond the condition of pull-in instability von Langfelder, G., Frizzi, T., Longoni, A., Tocchio, A., Manelli, D., Lasalandra, E.

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A new on-chip test structure for real time fatigue analysis in polysilicon MEMS von Langfelder, G., Longoni, A., Zaraga, F., Corigliano, A., Ghisi, A., Merassi, A.

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On-Chip Mechanical Characterization using an Electro-thermo-mechanical Actuator von Corigliano, A., Domenella, L., Langfelder, G.

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A microsystem for the fracture characterization of polysilicon at the micro-scale von Corigliano, A., Ghisi, A., Langfelder, G., Longoni, A., Zaraga, F., Merassi, A.

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Spectrally reconfigurable pixels for duai-color-mode imaging sensors von Langfelder, G

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Z-Axis Magnetometers for MEMS Inertial Measurement Units Using an Industrial Process von Langfelder, G., Buffa, C., Frangi, A., Tocchio, A., Lasalandra, E., Longoni, A.

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The Dependence of Fatigue in Microelectromechanical Systems on the Environment and the Industrial Packaging von Langfelder, G., Dellea, S., Zaraga, F., Cucchi, D., Urquia, M. A.

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Mechanical and Electronic Amplitude-Limiting Techniques in a MEMS Resonant Accelerometer von Tocchio, A., Caspani, A., Langfelder, G.

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Differential Fringe-Field MEMS Accelerometer von Langfelder, G., Tocchio, A.

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A Versatile Instrument for the Characterization of Capacitive Micro- and Nanoelectromechanical Systems von Buffa, C., Tocchio, A., Langfelder, G.

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Assessing micromechanical sensor characteristics via optical and electrical metrology von Langfelder, G, Tocchio, A, Thompson, M J, Jaramillo, G, Horsley, D A

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