Design of micromachines under uncertainty with the sample-average approximation method von GUARACAO, Jorge Mario MONSALVE, LANGA, Sergiu, STOLZ, Michael, MROSK, Andreas, KAISER, Bert, SCHENK, Harald

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Proof of concept of an air-coupled electrostatic ultrasonic transducer based on lateral motion von Monsalve, Jorge M., Melnikov, Anton, Stolz, Michael, Mrosk, Andreas, Jongmanns, Marcel, Wall, Franziska, Langa, Sergiu, Marica-Bercu, Ioana, Brändel, Tim, Kircher, Marco, Schenk, Hermann A.G., Kaiser, Bert, Schenk, Harald

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Coulomb-actuated microbeams revisited: experimental and numerical modal decomposition of the saddle-node bifurcation von Melnikov, Anton, Schenk, Hermann A. G., Monsalve, Jorge M., Wall, Franziska, Stolz, Michael, Mrosk, Andreas, Langa, Sergiu, Kaiser, Bert

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The push-pull principle: an electrostatic actuator concept for low distortion acoustic transducers von Kaiser, Bert, Schenk, Hermann A. G., Ehrig, Lutz, Wall, Franziska, Monsalve, Jorge M., Langa, Sergiu, Stolz, Michael, Melnikov, Anton, Conrad, Holger, Schuffenhauer, David, Schenk, Harald

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A small-gap electrostatic micro-actuator for large deflections von Conrad, Holger, Schenk, Harald, Kaiser, Bert, Langa, Sergiu, Gaudet, Matthieu, Schimmanz, Klaus, Stolz, Michael, Lenz, Miriam

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Design and characterization of a silicon MEMS microvalve for proportional flow control based on electrostatic bending actuators von Jongmanns, Marcel, Kaiser, Bert, Ruffert, Christine, Langa, Sergiu

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Highly integrable silicon micropumps using lateral electrostatic bending actuators von Uhlig, Sebastian, Gaudet, Matthieu, Langa, Sergiu, Ruffert, Christine, Jongmanns, Marcel, Schenk, Harald

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From single-ended to push-pull electrostatic MEMS speakers for in-ear audio applications von Ehrig, Lutz, Schenk, Hermann A. G., Wall, Franziska, Melnikov, Anton, Kaiser, Bert, Langa, Sergiu, Stolz, Michael, Monsalve Guaracao, Jorge Mario, Mrosk, Andreas, Conrad, Holger

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Electrostatically Driven In-Plane Silicon Micropump for Modular Configuration von Uhlig, Sebastian, Gaudet, Matthieu, Langa, Sergiu, Schimmanz, Klaus, Conrad, Holger, Kaiser, Bert, Schenk, Harald

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Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers von Kaiser, Bert, Langa, Sergiu, Ehrig, Lutz, Stolz, Michael, Schenk, Hermann, Conrad, Holger, Schenk, Harald, Schimmanz, Klaus, Schuffenhauer, David

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Pores in III-V Semiconductors von Föll, H., Langa, S., Carstensen, J., Christophersen, M., Tiginyanu, I.M.

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Rapid characterisation of mixtures of hydrogen and natural gas by means of ultrasonic time-delay estimation von Monsalve, Jorge M, Völz, Uwe, Jongmanns, Marcel, Betz, Björn, Langa, Sergiu, Ruffert, Christine, Amelung, Jörg, Wiersig, Marcus

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ZnSe-based conductive nanotemplates for nanofabrication von Monaico, Eduard, Tighineanu, Petru, Langa, Sergiu, Hartnagel, Hans L., Tiginyanu, Ion

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METHOD FOR LASER-BASED SINGULATING OF MICROCHIPS ON STRUCTURED SUBSTRATES von GANG, Andreas, LUDEWIG, Thomas, MROSK, Andreas, LANGA, Sergiu

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Mechanische Systeme mit angepasster Linearität von Langa, Sergiu, Shashank, Shashank

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MEMS with cover drive and method of operating the same von MONSALVE GUARACAO, Jorge Mario, KAISER, Bert, MELNIKOV, Anton, LANGA, Sergiu

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MEMS HAVING LID DRIVE AND METHOD FOR OPERATION THEREOF von MONSALVE GUARACAO, Jorge Mario, KAISER, Bert, MELNIKOV, Anton, LANGA, Sergiu

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MEMS HAVING A LARGE FLUIDICALLY EFFECTIVE SURFACE von KAISER, Bert, LANGA, Sergiu, CONRAD, Holger

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Housing for encapsulating a micro-scanner mirror von LANGA, SERGIU

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Self-organized pore formation and open-loop control in semiconductor etching von Claussen, Jens Christian, Carstensen, Jürgen, Christophersen, Marc, Langa, Sergiu, Föll, Helmut

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