METROLOGY OF NANOSHEET SURFACE ROUGHNESS AND PROFILE von Chouaib, Houssam, Chang, HaoMiao, Zhan, Tianrong, Gu, Teng, Lagodzinski, Andrew, Tan, Zhengquan

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METROLOGY OF NANOSHEET SURFACE ROUGHNESS AND PROFILE von TAN, Zhengquan, CHOUAIB, Houssam, LAGODZINSKI, Andrew, ZHAN, Tianrong, CHANG, HaoMiao, GU, Teng

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Methods and systems for selecting wafer locations to characterize cross-wafer variations based on high-throughput measurement signals von Wu, Song, Zhan, Tianrong, Lagodzinski, Andrew, Lin, Brian C, Li, Jiqiang

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Calibration Of Parametric Measurement Models Based On In-Line Wafer Measurement Data von Wu, Song, Zhan, Tianrong, Lagodzinski, Andrew, Lin, Brian C, Chiu, Emily, Wu, David

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Methods and systems for selecting wafer locations to characterize cross-wafer variations based on high-throughput measurement signals von WU Song, ZHAN Tianrong, LIN Brian C, LI Jiqiang, LAGODZINSKI Andrew

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CALIBRATION OF PARAMETRIC MEASUREMENT MODELS BASED ON IN-LINE WAFER MEASUREMENT DATA von WU, David, WU, Song, LAGODZINSKI, Andrew, CHIU, Emily, ZHAN, Tianrong, LIN, Brian C

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METHODS AND SYSTEMS FOR SELECTING WAFER LOCATIONS TO CHARACTERIZE CROSS-WAFER VARIATIONS BASED ON HIGH-THROUGHPUT MEASUREMENT SIGNALS von WU, Song, LAGODZINSKI, Andrew, ZHAN, Tianrong, LIN, Brian C, LI, Jiqiang

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Methods And Systems For Selecting Wafer Locations To Characterize Cross-Wafer Variations Based On High-Throughput Measurement Signals von Wu, Song, Zhan, Tianrong, Lagodzinski, Andrew, Lin, Brian C, Li, Jiqiang

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하이 스루풋 측정 신호에 기초하여 웨이퍼에 걸친 변동을 특성화하기 위해 웨이퍼 위치를 선택하는 방법 및 시스템 von LIN BRIAN C, ZHAN TIANRONG, LI JIQIANG, LAGODZINSKI ANDREW, WU SONG

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Calibration of parametric measurement models based on in-line wafer measurement data von LAGODZINSKI, ANDREW, ZHAN, TIAN-RONG, CHIU, EMILY ZHU-HAN, LIN, BRIAN JIA-HUI, WU, DAVID JUN-SHENG, WU, SONG

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Methods and systems for selecting wafer locations to characterize cross-wafer variations based on high-throughput measurement signals von LAGODZINSKI, ANDREW, LI, JI-QIANG, ZHAN, TIAN-RONG, LIN, BRIAN JIA-HUI, WU, SONG

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Memetic Genetic Algorithms for Time Series Compression by Piecewise Linear Approximation von Friedrich, Tobias, Krejca, Martin S., Lagodzinski, J. A. Gregor, Rizzo, Manuel, Zahn, Arthur

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