METHOD AND DEVICE FOR INCREASING LATERAL UNIFORMITY AND DENSITY OF LOW-TEMPERATURE PLASMA IN WIDE-APERTURE MICROELECTRONICS PROCESS REACTORS von Rylov Aleksej Anatolevich, Lukichev Vladimir Fedorovich, Rudenko Konstantin Vasilevich, Semin Yurij Fedorovich, Averkin Sergej Nikolaevich, Antipov Aleksandr Pavlovich, Myakonkikh Andrej Valerevich

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METHOD FOR PRODUCTION OF TUNNELLING MULTI-GATE FIELD NANOTRANSISTOR WITH SCHOTTKY CONTACTS von Vyurkov Vladimir Vladimirovich, Svintsov Dmitrij Aleksandrovich, Lukichev Vladimir Fedorovich, Rudenko Konstantin Vasilevich, Semin Yurij Fedorovich, Averkin Sergej Nikolaevich, Krivospitskij Anatolij Dmitrievich, Myakonkikh Andrej Valerevich

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METHOD OF PLASMA-STIMULATED ATOMIC-LAYER DEPOSITION OF INSULATING DIELECTRIC COATINGS ON HETEROSTRUCTURES OF NITRID-GALLIUM SEMICONDUCTOR DEVICES von Rogozhin Aleksandr Egenevich, Lukichev Vladimir Fedorovich, Rudenko Konstantin Vasilevich, Semin Yurij Fedorovich, Myakonkikh Andrej Valerevich

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TUNNEL UNALLOYED MULTI-SHEAR FIELD NANOTRANSISTOR WITH CONTACTS OF SCHOTTKY von Vyurkov Vladimir Vladimirovich, Svintsov Dmitrij Aleksandrovich, Lukichev Vladimir Fedorovich, Rudenko Konstantin Vasilevich, Semin Yurij Fedorovich

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METHOD OF ANISOTROPIC PLASMA ETCHING OF SILICON MICROSTRUCTURES IN A CYCLIC TWO-STEP OXIDATION-ETCHING PROCESS von Rylov Aleksej Anatolevich, Lukichev Vladimir Fedorovich, Rudenko Konstantin Vasilevich, Semin Yurij Fedorovich, Averkin Sergej Nikolaevich, Antipov Aleksandr Pavlovich, Myakonkikh Andrej Valerevich

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METHOD OF MAKING FIELD-EFFECT NANOTRANSISTOR WITH SCHOTTKY CONTACTS WITH SHORT NANOMETRE-LENGTH CONTROL ELECTRODE von RUDENKO KONSTANTIN VASIL'EVICH, V'JURKOV VLADIMIR VLADIMIROVICH, LUKICHEV VLADIMIR FEDOROVICH, SEMIN JURIJ FEDOROVICH, KRIVOSPITSKIJ ANATOLIJ DMITRIEVICH, OKSHIN ALEKSEJ ALEKSANDROVICH, ORLIKOVSKIJ ALEKSANDR ALEKSANDROVICH

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