Achieving ultrahigh etching selectivity of SiO2 over Si3N4 and Si in atomic layer etching by exploiting chemistry of complex hydrofluorocarbon precursors von Lin, Kang-Yi, Li, Chen, Engelmann, Sebastian, Bruce, Robert L., Joseph, Eric A., Metzler, Dominik, Oehrlein, Gottlieb S.

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Effect of Surface Potential on Extracellular Matrix Protein Adsorption von Lin, Jiun-Hao, Chang, Hsun-Yun, Kao, Wei-Lun, Lin, Kang-Yi, Liao, Hua-Yang, You, Yun-Wen, Kuo, Yu-Ting, Kuo, Ding-Yuan, Chu, Kuo-Jui, Chu, Yi-Hsuan, Shyue, Jing-Jong

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Effect of Surface Potential on NIH3T3 Cell Adhesion and Proliferation von Chang, Hsun-Yun, Huang, Chih-Chieh, Lin, Kang-Yi, Kao, Wei-Lun, Liao, Hua-Yang, You, Yun-Wen, Lin, Jiun-Hao, Kuo, Yu-Ting, Kuo, Ding-Yuan, Shyue, Jing-Jong

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Selective atomic layer etching of HfO2 over silicon by precursor and substrate-dependent selective deposition von Lin, Kang-Yi, Li, Chen, Engelmann, Sebastian, Bruce, Robert L., Joseph, Eric A., Metzler, Dominik, Oehrlein, Gottlieb S.

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Effect of Surface Potential on the Adhesion Behavior of NIH3T3 Cells Revealed by Quartz Crystal Microbalance with Dissipation Monitoring (QCM-D) von Kao, Wei-Lun, Chang, Hsun-Yun, Lin, Kang-Yi, Lee, Yi-Wei, Shyue, Jing-Jong

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Significance of plasma-photoresist interactions for atomic layer etching processes with extreme ultraviolet photoresist von Pranda, Adam, Lin, Kang-Yi, Engelmann, Sebastian, Bruce, Robert L., Joseph, Eric A., Metzler, Dominik, Oehrlein, Gottlieb S.

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Assessment of the Effects of Surface Potential on the Kinetics of HEK293T Cell Adhesion Behavior Using a Quartz Crystal Microbalance with Dissipation Monitoring von Kao, Wei-Lun, Chang, Hsun-Yun, Lin, Kang-Yi, Lee, Yi-Wei, Shyue, Jing-Jong

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Improvement of the gas cluster ion beam-(GCIB)-based molecular secondary ion mass spectroscopy (SIMS) depth profile with O2(+) cosputtering von Chu, Yi-Hsuan, Liao, Hua-Yang, Lin, Kang-Yi, Chang, Hsun-Yun, Kao, Wei-Lun, Kuo, Ding-Yuan, You, Yun-Wen, Chu, Kuo-Jui, Wu, Chen-Yi, Shyue, Jing-Jong

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Construction of cell-containing, anisotropic, three-dimensional collagen fibril scaffolds using external vibration and their influence on smooth muscle cell phenotype modulation von Zeng, Yao-Nan, Kang, Yi-Lin, Rau, Lih-Rou, Hsu, Fu-Yin, Tsai, Shiao-Wen

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Enhancing the Sensitivity of Molecular Secondary Ion Mass Spectrometry with C60 +‑O2 + Cosputtering von Liao, Hua-Yang, Lin, Kang-Yi, Kao, Wei-Lun, Chang, Hsun-Yun, Huang, Chih-Chieh, Shyue, Jing-Jong

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External vibration enhances macromolecular crowding for construction of aligned three-dimensional collagen fibril scaffolds von Hsu, Hsiao-Ting, Rau, Lih-Rou, Zeng, Yao-Nan, Kang, Yi-Lin, Tsai, Shiao-Wen, Wu, Min-Hsien

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Enhance current injection of organic light emitting diodes by inserting an organic superlattice von Cheng, Yu-Hung, Lin, Kang-Yi, Lee, Ming-Chang M.

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SiO2 etching and surface evolution using combined exposure to CF4/O2 remote plasma and electron beam von Lin, Kang-Yi, Preischl, Christian, Hermanns, Christian Felix, Rhinow, Daniel, Solowan, Hans-Michael, Budach, Michael, Edinger, Klaus, Oehrlein, G. S.

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Electron beam-induced etching of SiO2, Si3N4, and poly-Si assisted by CF4/O2 remote plasma von Lin, Kang-Yi, Preischl, Christian, Hermanns, Christian Felix, Rhinow, Daniel, Solowan, Hans-Michael, Budach, Michael, Marbach, Hubertus, Edinger, Klaus, Oehrlein, G. S.

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Study of ion bombardment effect for Alq 3 films von Cheng, Yu-Hung, Lin, Kang-Yi, Hung, Yang-Che, Cheng, Chien-Hong, Syao, Kao-Chih, Lee, Ming-Chang

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Improvement of the gas cluster ion beam-(GCIB)-based molecular secondary ion mass spectroscopy (SIMS) depth profile with O 2 + cosputtering von Chu, Yi-Hsuan, Liao, Hua-Yang, Lin, Kang-Yi, Chang, Hsun-Yun, Kao, Wei-Lun, Kuo, Ding-Yuan, You, Yun-Wen, Chu, Kuo-Jui, Wu, Chen-Yi, Shyue, Jing-Jong

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Enhancing the Sensitivity of Molecular Secondary Ion Mass Spectrometry with C 60 + -O 2 + Cosputtering von Liao, Hua-Yang, Lin, Kang-Yi, Kao, Wei-Lun, Chang, Hsun-Yun, Huang, Chih-Chieh, Shyue, Jing-Jong

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Improvement of the gas cluster ion beam-(GCIB)-based molecular secondary ion mass spectroscopy (SIMS) depth profile with O2+ cosputteringElectronic supplementary information (ESI)... von Chu, Yi-Hsuan, Liao, Hua-Yang, Lin, Kang-Yi, Chang, Hsun-Yun, Kao, Wei-Lun, Kuo, Ding-Yuan, You, Yun-Wen, Chu, Kuo-Jui, Wu, Chen-Yi, Shyue, Jing-Jong

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Improvement of the gas cluster ion beam-(GCIB)-based molecular secondary ion mass spectroscopy (SIMS) depth profile with O sub(2) super(+) cosputtering von Chu, Yi-Hsuan, Liao, Hua-Yang, Lin, Kang-Yi, Chang, Hsun-Yun, Kao, Wei-Lun, Kuo, Ding-Yuan, You, Yun-Wen, Chu, Kuo-Jui, Wu, Chen-Yi, Shyue, Jing-Jong

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An Action Research on Food and Farming Education Curriculum Development in a Rural Elementary School von Kang, Yi-Lin, Chang, Wei-Chi

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