Method to determine thermoelastic material properties of constituent and copper-patterned layers of multilayer printed circuit boards von Veldhuijzen van Zanten, J. F. J., Schuerink, G. A., Tullemans, A. H. J., Legtenberg, R., Wits, Wessel W.

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Electrostatic curved electrode actuators von Legtenberg, R., Gilbert, J., Senturia, S.D., Elwenspoek, M.

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Metformin Improves Cardiac Functional Recovery After Ischemia in Rats von Legtenberg, R. J., Houston, R. J. F., Oeseburg, B., Smits, P.

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Nonlinearity and hysteresis of resonant strain gauges von Chengqun Gui, Legtenberg, R., Tilmans, H.A.C., Fluitman, J.H.J., Elwenspoek, M.

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Comb-drive actuators for large displacements von Legtenberg, Rob, Groeneveld, A W, Elwenspoek, M

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Stiction in surface micromachining von Tas, Niels, Sonnenberg, Tonny, Jansen, Henri, Legtenberg, Rob, Elwenspoek, Miko

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Effects of sulfonylurea derivatives on ischemia-induced loss of function in the isolated rat heart von Legtenberg, Roger J, Houston, Ralph J.F, Oeseburg, Berend, Smits, Paul

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The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control von Jansen, H, Boer, M de, Legtenberg, R, Elwenspoek, M

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A fabrication process for electrostatic microactuators with integrated gear linkages von Legtenberg, R., Berenschot, E., Elwenspoek, M., Fluitman, J.H.

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An electrostatic lower stator axial-gap polysilicon wobble motor. I. Design and modeling von Legtenberg, R., Berenschot, E., van Baar, J., Elwenspoek, M.

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An electrostatic lower stator axial-gap polysilicon wobble motor. II. Fabrication and performance von Legtenberg, R., Berenschot, E., van Baar, J., Elwenspoek, M.

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Modeling Printed Circuit Board Curvature in Relation to Manufacturing Process Steps von Schuerink, G.A., Slomp, M., Wits, Wessel W., Legtenberg, R., Kappel, E.A.

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Low-temperature glass bonding for sensor application using boron oxide thin films von Legtenberg, R, Bouwstra, S, Elwenspoek, M

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Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms von Legtenberg, Rob, Tilmans, Harrie A.C., Elders, Job, Elwenspoek, Miko

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Q-factor dependence of one-port encapsulated polysilicon resonator on reactive sealing pressure von Gui, Chengqun, Legtenberg, R, Elwenspoek, M, Fluitman, J H

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The black silicon method II:The effect of mask material and loading on the reactive ion etching of deep silicon trenches von Jansen, Henri, de Boer, Meint, Burger, Johannes, Legtenberg, Rob, Elwenspoek, Miko

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Novel cooling strategy for electronic packages: Directly injected cooling von Wits, W.W., Vaneker, T.H.J., Mannak, J.H., Legtenberg, R.

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(Electro-) mechanical characteristics of electrostatically driven vacuum encapsulated polysilicon resonators von Tilmans, H.A.C., Legtenberg, R., Schurer, H., Ijntema, D.J., Elwenspoek, M., Fluitman, J.H.J.

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3D coupled electro-mechanics for MEMS: applications of CoSolve-EM von Gilbert, J.R., Legtenberg, R., Senturia, S.D.

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An electrostatic lower stator axial-gap polysilicon wobble motor. Part I: Design and modeling von LEGTENBERG, R, BERENSCHOT, E, VAN BAAR, J, ELWENSPOEK, M

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