Barrier properties and failure mechanism of Ta–Si–N thin films for Cu interconnection von Lee, Yoon-Jik, Suh, Bong-Seok, Kwon, Myoung Seok, Park, Chong-Ook

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Adhesion and interface chemical reactions of Cu/polyimide and Cu/TiN by XPS von Lee, Won-Jun, Lee, Youn-Seoung, Rha, Sa-Kyun, Lee, Yoon-Jik, Lim, Kwan-Yong, Chung, Yong-Duck, Whang, Chung-Nam

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Structural and chemical stability of Ta–Si–N thin film between Si and Cu von Lee, Yoon-Jik, Suh, Bong-Seok, Rha, Sa-Kyun, Park, Chong-Ook

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Boron pile-up at the interface between plasma enhanced chemical vapor deposited TiSi2 film and BF2-doped Si von Lee, Yoon-Jik, Sohn, Hyun Chul, Chung, Sung-Woong

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Co-sputter deposited Ta–Si diffusion barrier between Si and Cu: the effects of Si content on the barrier property von Lee, Yoon-Jik, Suh, Bong-Seok, Park, Chong-Ook

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Improved TiN film as a diffusion barrier between copper and silicon von Rha, Sa-Kyun, Lee, Won-Jun, Lee, Seung-Yun, Hwang, Yong-Sup, Lee, Yoon-Jik, Kim, Dong-Il, Kim, Dong-Won, Chun, Soung-Soon, Park, Chong-Ook

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Crystallization of amorphous WNx films von Suh, Bong-Seok, Cho, Heung-Kuon, Lee, Yoon-Jik, Lee, Won-Jun, Park, Chong-Ook

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Texture and sheet resistance of Al alloy thin films on Ti and TiN thin films von LEE, Won-Jun, KIM, Sun-Jae, LEE, Wonhee, LEE, Yoon-Jik, LEE, Youn-Seoung, RHA, Sa-Kyun, CHONG OOK PARK

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Properties of reactively sputtered WN x as Cu diffusion barrier von Suh, Bong-Seok, Lee, Yoon-Jik, Hwang, Jeong-Sug, Park, Chong-Ook

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Properties of reactively sputtered WNx as Cu diffusion barrier von SUH, B.-S, LEE, Y.-J, HWANG, J.-S, PARK, C.-O

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Properties of reactively sputtered WN sub(x) as Cu diffusion barrier von Suh, Bong-Seok, Lee, Yoon-Jik, Hwang, Jeong-Sug, Park, Chong-Ook

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METHOD FOR FORMING INTERCONNECTION OF SEMICONDUCTOR DEVICE TO IMPROVE CHARACTERISTICS OF CONTACT RESISTANCE AND LEAKAGE CURRENT von LEE, YOON JIK

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T7 RNA polymerase mutant as well as preparation method and application thereof von LEE YOON-JIK, XU YUTING, YAO HONG, WEI WEI

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High-enzyme-activity inorganic pyrophosphatase mutant as well as preparation method and application thereof von LEE YOON-JIK, SHI LINFENG, WANG WEIWEN, WU JUNHONG, ZHANG LIANGLIANG, YAO HONG, WEI WEI

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LIGHTNING RECOGNITION CONTROLLER APPARATUS AND ITS CONTROL METHOD von LEE, YOON JIK

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Method for fabricating titanium silicide film von Lee, Yoon-Jik

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Method for fabricating titanium silicide film von LEE YOON-JIK

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Method for fabricating titanium silicide film von LEE YOON-JIK

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Method for fabricating titanium silicide film von Lee, Yoon-Jik

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SYSTEM-ON-CHIP FOR PROCESSING SECURE CONTENT AND MOBILE DEVICE COMPRISING THE SAME von PARK DONGJIN, OH JAERYUL, LEE YOON-JIK, KANG MYUNGHEE, KIM CHUNG TAE, WON JONG-BIN

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