Effect of reactive gases (NH3/N2) on silicon–nitride thin films deposited with diiodosilane (SiH2I2) precursors von Lee, Baek-Ju, Seo, Dong-Won, Choi, Jae-Wook

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Analysis of the influence of disk and wafer rotation speed on the SiO2 thin-film characteristics in a space-divided PE-ALD system von Lee, Baek-Ju, Seo, Dong-Won, Choi, Jae-Wook

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Study on the Deposition Characteristics of Molybdenum Thin Films Deposited by the Thermal Atomic Layer Deposition Method Using MoO2Cl2 as a Precursor von Lee, Baek-Ju, Lee, Kyu-Beom, Cheon, Min-Ho, Seo, Dong-Won, Choi, Jae-Wook

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The Effect of Deposition Temperature of TiN Thin Film Deposition Using Thermal Atomic Layer Deposition von Lee, Baek-Ju, Kim, Yoo-Seong, Seo, Dong-Won, Choi, Jae-Wook

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A Study on the Gap-Fill Process Deposited by the Deposition/Etch/Deposition Method in the Space-Divided PE-ALD System von Lee, Baek-Ju, Seo, Dong-Won, Choi, Jae-Wook

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차세대 메모리 디바이스Gap-Fill 공정 위한 공간 분할 PE-ALD개발 및 공정 설계 von 이백주(Baek-Ju Lee), 황재순(Jae-Soon Hwang), 서동원(Dong-Won Seo), 최재욱(Jae-Wook Choi)

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Study on the Deposition Characteristics of Molybdenum Thin Films Deposited by the Thermal Atomic Layer Deposition Method Using MoO[sub.2]Cl[sub.2] as a Precursor von Lee, Baek-Ju, Lee, Kyu-Beom, Cheon, Min-Ho, Seo, Dong-Won, Choi, Jae-Wook

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A novel low-voltage tunable capacitor for tunable RF circuit applications von Lee, Young Chul, Lee, Baek Ju, Ko, Kyung Hyun

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ERRATUM: A Novel Low-Voltage Tunable Capacitor for Tunable RF Circuit Applications von Chul Lee, Young, Ju Lee, Baek, Hyun Ko, Kyung

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Method for forming a thin film of Molybdenum atomic layer von LEE BAEK JU

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Apparatus for processing substrate von LEE BAEK JU

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Layer deposition apparatus having multi-stage heaters von LEE BAEK JU

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Window plate for plasma process and substrate processing apparatus using the same von LEE BAEK JU

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Gas injection apparatus having a single chamber of large area von LEE BAEK JU

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SHOWERHEAD AND SUBSTRATE TREATMENT APPARATUS INCLUDING SAME von SEO, Dong Won, LEE, Baek Ju, KIM, Sang Yeop, CHEON, Min Ho, CHO, Hyun Chul, HAN, Pil Hee, RYU, Hui Seong

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SUBSTRATE TREATMENT DEVICE von SEO, Dong Won, LEE, Baek Ju, CHO, Hyun Chul

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SUBSTRATE PROCESSING DEVICE HAVING HEAT HOLE von SEO, Dong Won, KONG, Han Young, LEE, Baek Ju, KIM, Su Woong, KIM, Sang Bo, CHOI, Jae Wook, MOON, Sang Yoon, HWANG, Jae Soon, CHOI, Seung Dae

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Mobile terminal with Wi-Fi module operating in a power saving mode and providing an AP function and a method for controlling said terminal von Lee, Baek Ju, Yun, Jeong Kyun

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PROCESS CHAMBER FOR SUBSTRATE PROCESSING AND SHOWERHEAD FOR REACTIVE GAS INJECTION von LEE BAEK JU, SEO DONG WON

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Mobile communication terminal having multicasting function and multicasting method using the same von Lee, Baek Ju

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