Resistivity, grain size, and impurity effects in chemically vapor-deposited tungsten films von LEARN, A. J, FOSTER, D. W

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Modeling of the reaction for low pressure chemical vapor deposition of silicon dioxide von LEARN, A. J

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Effects of ion implantation on charges in the silicon–silicon dioxide system von Learn, A. J., Hess, D. W.

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Effects of oxidation and nitrogen annealing on ion-implantation-induced interface states in the silicon–silicon dioxide system von Hess, D. W., Learn, A. J.

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Anodization of aluminum to inhibit hillock growth during high temperature processing von Dell'oca, C.J., Learn, A.J.

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Phosphorus incorporation effects in silicon dioxide grown at low pressure and temperature von LEARN, A. J

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Growth of borosilicate and borophosphosilicate films at low pressure and temperature von Learn, Arthur J., Baerg, Bill

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Characterization of oxide growth at high temperatures and low pressures from silane/nitrous oxide reaction von LEARN, A. J, JACKSON, R. B

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Aluminum alloy film deposition and characterization von Learn, Arthur J.

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Methods for minimizing silicon regrowth in aluminum films von Learn, Arthur J., Nowicki, R. S.

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Studies of silicon regrowth with aluminum and aluminum alloy metallizations von Nowicki, Ronald S., Learn, Arthur J.

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Growth morphology and crystallographic orientation of β-SiC films formed by chemical conversion von Learn, A.J., Khan, I.H.

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Mobility studies of degenerate, indium-doped CdS evaporated films von Learn, A.J., Scott-Monck, J.A.

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Deposition and electrical properties of in situ phosphorus-doped silicon films formed by low-pressure chemical vapor deposition von LEARN, A. J, FOSTER, D. W

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Closure to “Discussion of ‘Evolution and Current Status of Aluminum Metallization’ [A. J. Learn (pp. 894–906, Vol. 123, No. 6)]” von Learn, A. J.

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Evolution and Current Status of Al Metallization von Learn, A J

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Effect of Structure and Processing on Electromigration-Induced Failure in Anodized Al von Learn, A J

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Electromigration Effects in Al Alloy Metallization von Learn, A J

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Methods for Minimizing Silicon Rerowth in Aluminum Films von Learn, A J, Nowicki, R S

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Evolution and Current Status of Aluminum Metallization von Learn, Arthur J.

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