Testing the limiting coefficient of friction with an adjustable 3-V kinematic coupling von Hale, Layton C.

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Response to “Stiffness modeling of flexure parallel mechanism” [Prec Eng 29 (2005) 467–478] von Hale, Layton C.

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Optimal design techniques for kinematic couplings von Hale, Layton C., Slocum, Alexander H.

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HIGH BANDWIDTH BINARY MULTI-LEAF COLLIMATOR DESIGN von HALE, Layton, DUVAL, Eugene, LARKIN, David

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High bandwidth binary multi-leaf collimator design von Hale, Layton, Larkin, David, Knapp, William

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Current Status of the EUV Engineering Test Stand von Leung, Alvin H., Tichenor, Daniel A., Replogle, William C., Goldsmith, John E. M., Kubiak, Glenn D., Stulen, Richard H., Ballard, William P., Jefferson, Karen L., Klebanoff, Leonard E., O'Connell, Donna J., Wronosky, John B., Taylor, John S., Folta, James A., Hale, Layton C., Chapman, Henry N., Sweeney, Donald W., Lee, Sang H., Attwood, David T., Goldberg, Kenneth A., Naulleau, Patrick

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HIGH BANDWIDTH BINARY MULTI-LEAF COLLIMATOR DESIGN von HALE, Layton, KNAPP, William, LARKIN, David

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High bandwidth binary multi-leaf collimator design von Hale, Layton, Larkin, David, Knapp, William, Meer, David

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DROPLET GENERATION FOR A LASER PRODUCED PLASMA LIGHT SOURCE von Hale, Layton, Khodykin, Oleg, Garcia, Rudy F, Bykanov, Alexander, Ahr, Brian

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HEAT REMOVAL FROM SUBSTRATES IN VACUUM von HALE, LAYTON, C, ZYWNO, MAREK

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Droplet generation for a laser produced plasma light source von Hale, Layton, Khodykin, Oleg, Garcia, Rudy F, Bykanov, Alexander, Ahr, Brian

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HEAT REMOVAL FROM SUBSTRATES IN VACUUM von HALE, LAYTON, C, ZYWNO, MAREK

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Wafer stage with reciprocating wafer stage actuation control von UMMETHALA UPENDRA, ZYWNO MAREK, HALE LAYTON

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APPARATUS FOR GENERATION OF EXTREME ULTRAVIOLET LIGHT AND INSPECTION SYSTEM COMPRISING THE SAME von HALE, Layton, AHR, Brian, GARCIA, Rudy F, KHODYKIN, Oleg, BYKANOV, Alexander, WACK, Daniel, WALSH, Joseph, CHILESE, Frank, TSIGUTKIN, Konstantin

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HEAT REMOVAL FROM SUBSTRATES IN VACUUM von HALE, LAYTON, C, ZYWNO, MAREK

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Heat Removal From Substrates In Vacuum von ZYWNO MAREK, HALE LAYTON CARTER

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HIGH BANDWIDTH BINARY MULTI-LEAF COLLIMATOR DESIGN von HALE, Layton, KNAPP, William, DIGGS, Matthew, MEER, David, DUVAL, Eugene, LARKIN, David

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HIGH BANDWIDTH BINARY MULTI-LEAF COLLIMATOR DESIGN von HALE, Layton, KNAPP, William, DIGGS, Matthew, MEER, David, DUVAL, Eugene, LARKIN, David

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Linear Stage for reflective electron beam lithography von Clyne Joshua, Wilson Andrew, Hale Layton, Ummethala Upendra, Nayfeh Samir, Di Regolo Joseph A, Williams Mark

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SYSTEM AND METHOD FOR GENERATION OF EXTREME ULTRAVIOLET LIGHT von HALE, Layton, KHODYKIN, Oleg, BYKANOV, Alexander, WACK, Daniel, WALSH, Joseph, CHILESE, Frank, TSIGUTKIN, Konstantin

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