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  1. 1
    Loading and/or unloading device for substrate processing equipment, has conveyor comprising centering device, where equipment exhibits control for movement of conveyor, centering device, elements, lifting and lowering device and array

    Loading and/or unloading device for substrate processing equipment, has conveyor comprising centering device, where equipment exhibits control for movement of conveyor, centering d... von LAESKER, MARCEL, OELSNER, DANIEL

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  2. 2
    Substrate turn device for e.g. continuous flow system for processing plate-shaped substrates, has holding members or axes connected by connector and provided transverse to members or axes, where connector is rotatable around axis

    Substrate turn device for e.g. continuous flow system for processing plate-shaped substrates, has holding members or axes connected by connector and provided transverse to members... von EISMANN, LUTZ, RICHTER, THILO, HELBIG, THOMAS, LAESKER, MARCEL, MAI, JOACHIM, OELSNER, DANIEL

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