Geometrical parameters measurement of surface functionalized micromachined micro-cantilever using optical method von Kurhekar, Anil Sudhakar, Apte, Prakash R

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On stiction mechanism of bulk micro-machined micro-mechanical structures von Kurhekar, Anil Sudhakar

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Thermal annealing improves electrical properties of hetero-junction diode von Kurhekar, Anil Sudhakar

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Growth and Characterization of High-Quality Dielectric Sputtered Zinc Oxide Films from the First Principle von Kurhekar, Anil, Apte, Prakash R., Duttagupta, Siddharth

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Design and Fabrication of Bulk Micro-machined, High Resilience, High-Q, High Tilt Angle, Low Driving Voltage, Flexure Beam Micro-mirrors on Mono-crystalline Silicon von Kurhekar, Anil Sudhakar, Apte, P. R., Duttagupta, S. P.

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Spectroscopic-ellipsometric study of native oxide removal by liquid phase HF process von Kurhekar, Anil Sudhakar, Apte, Prakash R

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Step-Height Measurement of Surface Functionalized Micromachined Microcantilever Using Scanning White Light Interferometry von Kurhekar, Anil Sudhakar, Apte, P R

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