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Optical constants of reactively-sputtered NbN films
Veröffentlicht in Thin solid films
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Three-dimensional thin-film-transistor silicon-oxide-nitride-oxide-silicon memory cell formed on large grain sized polysilicon films using nuclei induced solid phase crystallizatio...
Veröffentlicht in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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Three-dimensional thin-film-transistor silicon-oxide-nitride-oxide-silicon memory cell formed on large grain sized polysilicon films using nucleiinduced solid phase crystallization
Veröffentlicht in Journal of vacuum science & technology. B, Microelectronics processing and phenomena
VolltextArtikel