Formation of Defects Forming Deep Levels in SiON/AlGaN/GaN Structures von Enisherlova, K. L., Mikhaylov, I. A., Seidman, L. A., Kirilenko, E. P., Kolkovsky, Yu. V.

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The ALD Films of Al2O3, SiNx, and SiON as Passivation Coatings in AlGaN/GaN HEMT von Enisherlova, K. L., Temper, E. M., Kolkovsky, Yu. V., Medvedev, B. K., Kapilin, S. A.

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