Coherent Fourier scatterometry for particle detection on structured surfaces von Paul, Anubhav, Kolenov, Dmytro, Pereira, Silvania F.

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Particle detection enhancement by combining coherent Fourier scatterometry with synthetic optical holography von Yin, Haoyang, Kolenov, Dmytro, Pereira, Silvania

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Coherent Fourier Scatterometry for defect detection on SiC samples von Rafighdoost, Jila, Kolenov, Dmytro, Pereira, Silvania F.

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Coherent Fourier scatterometry nanoparticle detection enhanced by synthetic optical holography von Yin, Haoyang, Kolenov, Dmytro, Pereira, Silvania F.

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A highly sensitive laser focus positioning method with sub-micrometre accuracy using coherent Fourier scatterometry von Kolenov, Dmytro, Meng, Peiwen, Pereira, Silvania

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Coherent Fourier Scatterometry for Detection of Killer Defects on Silicon Carbide Samples von Rafighdoost, Jila, Kolenov, Dmytro, Pereira, Silvania F.

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Coherent Fourier scatterometry: a holistic tool for inspection of isolated particles or defects on gratings von Paul, Anubhav, Kolenov, Dmytro, Scholte, Thomas, Pereira, Silvania F.

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Coherent Fourier Scatterometry for detection of killer defects on silicon carbide samples von Rafighdoost, Jila, Kolenov, Dmytro, Pereira, Silvania F

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Flat thin films forward simulations (Complex fresnel rs and rp). Rough thin film of sio2, sweeped in thickness about 1micron (Intensity and raw rs and rp.) Both as measured with 0... von Kolenov, Dmytro, Pereira, Silvania

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Coherent Fourier Scatterometry for detection of killer defects on silicon carbide samples von Rafighdoost, Jila, Kolenov, Dmytro, Pereira, Silvania F

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Training and test data for the preparation of the article: Convolutional Neural Network Applied for Nanoparticle Classification using Coherent Scaterometry Data von Kolenov, Dmytro, Davidse, D. (Davy)

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