Evaluation of via density and low-k Young's modulus influence on mechanical performance of advanced node multi-level Back-End-Of-Line von Ključar, Luka, González, Mario, De Wolf, Ingrid, Croes, Kristof, Bömmels, Jürgen, Tőkei, Zsolt

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Effect of 4-point bending test procedure on crack propagation in thin film stacks von Ključar, Luka, Gonzalez, Mario, Vanstreels, Kris, Ivanković, Andrej, Hecker, Michael, De Wolf, Ingrid

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Impact of via density and passivation thickness on the mechanical integrity of advanced Back-End-Of-Line interconnects von Ključar, Luka, González, Mario, Croes, Kristof, De Wolf, Ingrid, De Messemaeker, Joke, Murdoch, Gayle, Nolmans, Philip, De Vos, Joeri, Bömmels, Jürgen, Beyne, Eric, Tőkei, Zsolt

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Strength and Reliability Characterization of Multi-Level Back-End-of-Line under Chip Package Interaction Loading von Kljucar, Luka

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Oxygen Defect Stability in Amorphous, C‑Axis Aligned, and Spinel IGZO von van Setten, Michiel J, Dekkers, Harold F. W, Kljucar, Luka, Mitard, Jerome, Pashartis, Christopher, Subhechha, Subhali, Rassoul, Nouredine, Delhougne, Romain, Kar, Gouri S, Pourtois, Geoffrey

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Effect of 4-point bending test procedure on crack propagation in thin film stacks von Kljucar, Luka, Gonzalez, Mario, Vanstreels, Kris, Ivankovic, Andrej, Hecker, Michael, De Wolf, Ingrid

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(Invited) Sub-40mV Sigma V TH Igzo nFETs in 300mm Fab von Mitard, Jerome, Kljucar, Luka, Rassoul, Nouredine, Dekkers, Harold F. W., van Setten, Michiel, Chasin, Adrian, Pourtois, Geoffrey, Belmonte, Attilio, Delhougne, Romain, Donadio, Gabriele Luca, Goux, Ludovic, Nag, Manoj, Wilson, Chris, Tokei, Zsolt, Borniquel, Jose Ignacio del agua, Steudel, Soeren, Kar, Gouri Sankar

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(Invited) Sub-40mV Sigma VTH Igzo nFETs in 300mm Fab von Mitard, Jerome, Kljucar, Luka, Rassoul, Nouredine, Dekkers, Harold F. W., van Setten, Michiel, Chasin, Adrian, Pourtois, Geoffrey, Belmonte, Attilio, Delhougne, Romain, Donadio, Gabriele Luca, Goux, Ludovic, Nag, Manoj, Wilson, Chris, Tokei, Zsolt, Borniquel, Jose Ignacio del agua, Steudel, Soeren, Kar, Gouri Sankar

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A STRESS SENSOR SUITABLE FOR MEASURING MECHANICAL STRESS IN A LAYERED METALLIZATION STRUCTURE OF A MICROELECTRONIC COMPONENT von Kljucar, Luka, Hiblot, Gaspard

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Stress sensor suitable for measuring mechanical stress in a layered metallization structure of a microelectronic component von Kljucar, Luka, Hiblot, Gaspard

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Bipolar selector device for a memory array von Houshmand Sharifi, Shamin, Kljucar, Luka, Hiblot, Gaspard

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STRESS SENSOR SUITABLE FOR MEASURING MECHANICAL STRESS IN A LAYERED METALLIZATION STRUCTURE OF A MICROELECTRONIC COMPONENT von Kljucar, Luka, Hiblot, Gaspard

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Sub-40mV Sigma-VTH IGZO nFETs in 300mm Fab von Mitard, Jerome, Kljucar, Luka, Rassoul, Nouredine, Dekkers, Harold, Michiel van Setten, Adrian Vaisman Chasin, Pourtois, Geoffrey, Belmonte, Attilio, Donadio, Gabriele Luca, Goux, Ludovic, Mao, Ming, Harinarayanan Puliyalil, Teugels, Lieve, Tsvetanova, Diana, Nag, Manoj, Steudel, Soeren, Jose Ignacio del Agua Borniquel, Ramalingam, Jothilingam, Delhougne, Romain, Wilson, Chris J, Tokei, Zsolt, Kar, Gouri Sankar

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BIPOLAR SELECTOR DEVICE FOR A MEMORY ARRAY von Houshmand Sharifi, Shamin, Kljucar, Luka, Hiblot, Gaspard

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BIPOLAR SELECTOR DEVICE FOR A MEMORY ARRAY von Houshmand Sharifi, Shamin, Kljucar, Luka, Hiblot, Gaspard

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(Invited) Sub-40mV Sigma V TH Igzo nFETs in 300mm Fab von Mitard, Jerome, Kljucar, Luka, Rassoul, Nouredine, Dekkers, Harold F. W., van Setten, Michiel, Chasin, Adrian, Pourtois, Geoffrey, Belmonte, Attilio, Delhougne, Romain, Donadio, Gabriele Luca, Goux, Ludovic, Nag, Manoj, Wilson, Chris, Tokei, Zsolt, Borniquel, Jose Ignacio del agua, Steudel, Soeren, Kar, Gouri Sankar

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Design aspects for CPI robust BEOL von Gonzalez, Mario, Kljucar, Luka, Vandevelde, Bart, De Wolf, Ingrid, Tokei, Zsolt

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A STRESS SENSOR SUITABLE FOR MEASURING MECHANICAL STRESS IN A LAYERED METALLIZATION STRUCTURE OF A MICROELECTRONIC COMPONENT von Hiblot, Mr. Gaspard, Kljucar, Mr. Luka

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Sensor suitable for measuring mechanical stress in layered metallization structure of microelectronic component von HIBLOT MR GASPARD, KLJUCAR MR LUKA

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