Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range von Siefke, Thomas, Kroker, Stefanie, Pfeiffer, Kristin, Puffky, Oliver, Dietrich, Kay, Franta, Daniel, Ohlídal, Ivan, Szeghalmi, Adriana, Kley, Ernst-Bernhard, Tünnermann, Andreas

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The structural and optical properties of black silicon by inductively coupled plasma reactive ion etching von Steglich, Martin, Käsebier, Thomas, Zilk, Matthias, Pertsch, Thomas, Kley, Ernst-Bernhard, Tünnermann, Andreas

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Spatial and Spectral Light Shaping with Metamaterials von Walther, Benny, Helgert, Christian, Rockstuhl, Carsten, Setzpfandt, Frank, Eilenberger, Falk, Kley, Ernst-Bernhard, Lederer, Falk, Tünnermann, Andreas, Pertsch, Thomas

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Modular nonlinear hybrid plasmonic circuit von Tuniz, Alessandro, Bickerton, Oliver, Diaz, Fernando J., Käsebier, Thomas, Kley, Ernst-Bernhard, Kroker, Stefanie, Palomba, Stefano, de Sterke, C. Martijn

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Fabrication of nanoscale lithium niobate waveguides for second-harmonic generation von Geiss, Reinhard, Saravi, Sina, Sergeyev, Anton, Diziain, Séverine, Setzpfandt, Frank, Schrempel, Frank, Grange, Rachel, Kley, Ernst-Bernhard, Tünnermann, Andreas, Pertsch, Thomas

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Circular Dichroism from Chiral Nanomaterial Fabricated by On-Edge Lithography von Dietrich, Kay, Lehr, Dennis, Helgert, Christian, Tünnermann, Andreas, Kley, Ernst-Bernhard

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Merging Top‐Down and Bottom‐Up Approaches to Fabricate Artificial Photonic Nanomaterials with a Deterministic Electric and Magnetic Response von Dietrich, Kay, Zilk, Matthias, Steglich, Martin, Siefke, Thomas, Hübner, Uwe, Pertsch, Thomas, Rockstuhl, Carsten, Tünnermann, Andreas, Kley, Ernst‐Bernhard

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Chiral Metamaterial Composed of Three-Dimensional Plasmonic Nanostructures von Helgert, Christian, Pshenay-Severin, Ekaterina, Falkner, Matthias, Menzel, Christoph, Rockstuhl, Carsten, Kley, Ernst-Bernhard, Tünnermann, Andreas, Lederer, Falk, Pertsch, Thomas

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High performance diffraction gratings made by e-beam lithography von Zeitner, Uwe D., Oliva, Maria, Fuchs, Frank, Michaelis, Dirk, Benkenstein, Tino, Harzendorf, Torsten, Kley, Ernst-Bernhard

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Black Germanium fabricated by reactive ion etching von Steglich, Martin, Käsebier, Thomas, Kley, Ernst-Bernhard, Tünnermann, Andreas

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An ultra-black silicon absorber von Steglich, Martin, Lehr, Dennis, Ratzsch, Stephan, Käsebier, Thomas, Schrempel, Frank, Kley, Ernst-Bernhard, Tünnermann, Andreas

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Broadband iridium wire grid polarizer for UV applications von WEBER, Thomas, KÄSEBIER, Thomas, KLEY, Ernst-Bernhard, TÜNNERMANN, Andreas

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Photonic crystals in lithium niobate by combining focussed ion beam writing and ion-beam enhanced etching von Geiss, Reinhard, Diziain, Séverine, Steinert, Michael, Schrempel, Frank, Kley, Ernst-Bernhard, Tünnermann, Andreas, Pertsch, Thomas

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Silicon wire grid polarizer for ultraviolet applications von Weber, Thomas, Kroker, Stefanie, Käsebier, Thomas, Kley, Ernst-Bernhard, Tünnermann, Andreas

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Soft X‐ray varied‐line‐spacing gratings fabricated by near‐field holography using an electron beam lithography‐written phase mask von Lin, Dakui, Liu, Zhengkun, Dietrich, Kay, Sokolov, Andréy, Sertsu, Mewael Giday, Zhou, Hongjun, Huo, Tonglin, Kroker, Stefanie, Chen, Huoyao, Qiu, Keqiang, Xu, Xiangdong, Schäfers, Franz, Liu, Ying, Kley, Ernst-Bernhard, Hong, Yilin

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Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS von Ratzsch, Stephan, Kley, Ernst-Bernhard, Tünnermann, Andreas, Szeghalmi, Adriana

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Plasmonic Tip Based on Excitation of Radially Polarized Conical Surface Plasmon Polariton for Detecting Longitudinal and Transversal Fields von Tugchin, Bayarjargal N, Janunts, Norik, Klein, Angela E, Steinert, Michael, Fasold, Stefan, Diziain, Séverine, Sison, Miguel, Kley, Ernst-Bernhard, Tünnermann, Andreas, Pertsch, Thomas

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Influence of the oxygen plasma parameters on the atomic layer deposition of titanium dioxide von Ratzsch, Stephan, Kley, Ernst-Bernhard, Tünnermann, Andreas, Szeghalmi, Adriana

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Top-Up Fabrication of Gold Nanorings von Scheeler, Sebastian P., Lehr, Dennis, Kley, Ernst-Bernhard, Pacholski, Claudia

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Iridium wire grid polarizer fabricated using atomic layer deposition von Weber, Thomas, Käsebier, Thomas, Szeghalmi, Adriana, Knez, Mato, Kley, Ernst-Bernhard, Tünnermann, Andreas

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