CMOS-Integrated Si/SiGe Quantum-Well Infrared Microbolometer Focal Plane Arrays Manufactured With Very Large-Scale Heterogeneous 3-D Integration von Forsberg, Fredrik, Lapadatu, Adriana, Kittilsland, Gjermund, Martinsen, Stian, Roxhed, Niclas, Fischer, Andreas C., Stemme, Goran, Samel, Bjorn, Ericsson, Per, Hoivik, Nils, Bakke, Thor, Bring, Martin, Kvisteroy, Terje, Ror, Audun, Niklaus, Frank

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Leak Rates and Residual Gas Pressure in Cavities Sealed by Metal Thermo-Compression Bonding and Silicon Direct Bonding von Schjølberg-Henriksen, Kari, Malik, Nishant, Sandvand, Asmund, Kittilsland, Gjermund, Moe, Sigurd Teodor

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Boron etch-stop in TMAH solutions von Steinsland, Elin, Nese, Martin, Hanneborg, Anders, Bernstein, Ralph W., Sandmo, Halle, Kittilsland, Gjermund

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A model for the etch-stop location on reverse-biased pn junctions von Lapadatu, Daniel, Kittilsland, Gjermund, Nese, Martin, Nilsen, Svein M., Jakobsen, Henrik

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Fluxless wafer-level Cu-Sn bonding for micro- and nanosystems packaging von Hoivik, N, Kaiying Wang, Aasmundtveit, K, Salomonsen, G, Lapadatu, A, Kittilsland, G, Stark, B

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Filter Structure for Sub-Micron Filtration Fabricated in Silicon von Kittilsland, G., Stemme, G.

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An integrated resonant accelerometer microsystem for automotive applications von Ohlckers, Per, Holm, Reidar, Jakobsen, Henrik, Kvisteroy, Terje, Kittilsland, Gjermund, Larsen, André, Nese, Martin, Nilsen, Svein M., Ferber, Alain

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New fluid filter structure in silicon fabricated using a self-aligning technique von STEMME, G, KITTILSLAND, G

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A model for the etch stop location on reversed biased pn junctions von Lapadatu, D., Kittilsland, G., Nese, M., Nilsen, S.M., Jakobsen, H.

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An integrated resonant accelerometer microsystem for automotive applications von Ohlckers, P., Holm, R., Jakobsen, H., Kvisteroy, T., Kittilsland, G., Nese, M., Nilsen, S.M., Ferber, A.

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A silicon sensor for measurement of liquid flow and thickness of fouling biofilms von Stenberg, Manne, Stemme, Göran, Kittilsland, Gjermund, Pedersen, Karsten

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Boron Etch-stop In TMAH Solutions von Steinsland, E., Nese, M., Hanneborg, A., Bernstein, R.W., Sandmo, H., Kittilsland, G.

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