Analysis of image of objective for formation of nanostructures by computer isophotometry method von Bakaev, M. I., Voznesenskii, N. B., Gavrilov, E. V., Zhevlakov, A. P., Kirillovskiĭ, V. K., Orlov, P. V.

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Interference inspection of the aspherical components of an objective for nanolithography von Voznesensky, N. B., Gavrilov, E. V., Zhevlakov, A. P., Kirillovskiĭ, V. K., Orlov, P. V.

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Implementation of a quantitative Foucault knife-edge method by means of isophotometry von Zhevlakov, A. P., Zatsepina, M. E., Kirillovskii, V. K.

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Transformation of a Foucault shadowgram into the geometrical model of a shear interferogram by means of isophotometry von Zhevlakov, A. P., Zatsepina, M. E., Kirillovskii, V. K.

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