High-temperature atomic layer deposition of silicon oxide films using Tris(dimethylamino)silane and ozone von Kim, Okhyeon, Choi, Yoonho, Kim, Changgyu, Kim, Hye-Lee, Lee, Won-Jun

Volltext

Surface reaction during thermal atomic layer etching of aluminum oxide films using fluorine radicals and trimethylaluminum von Kim, Yewon, Kim, Okhyeon, Cho, Gyejun, Kim, Hye-Lee, Kim, Minsu, Cho, Byungchul, Park, Sangjoon, Jung, Jongwan, Lee, Won-Jun

Volltext

Composition control of conformal crystalline GeSbTe films by atomic layer deposition supercycles and tellurization annealing von Kim, Yewon, Kim, Kwonyoung, Kim, Okhyeon, Park, Chang Yup, Koo, Dong Geon, Ahn, Dong-Ho, Kuh, Bong Jin, Lee, Won-Jun

Volltext

Growth mechanism of Ge2Sb2Te5 thin films by atomic layer deposition supercycles of GeTe and SbTe von Kim, Okhyeon, Kim, Yewon, Kim, Hye-Lee, Wu, Zhe, Park, Chang Yup, Ahn, Dong-Ho, Kuh, Bong Jin, Lee, Won-Jun

Volltext

Correction: Composition control of conformal crystalline GeSbTe films by atomic layer deposition supercycles and tellurization annealing von Kim, Yewon, Kim, Kwonyoung, Kim, Okhyeon, Park, Chang Yup, Koo, Dong Geon, Ahn, Dong-Ho, Kuh, Bong Jin, Lee, Won-Jun

Volltext

Thermal Atomic Layer Deposition of Gallium Nitride Films Using Tris(dimethylamido)Gallium and Ammonia von CHOI, YeRim, Kim, Okhyeon, Heo, Jian, Kim, Hye-Lee, Lee, Won-Jun

Volltext

Atomic Layer Etching of Al 2 O 3 Using F Radical and Al Precursors: Surface Reaction and Reaction Mechanism Study von Kim, Yewon, Cho, Gyejun, Kim, Okhyeon, Choi, Ye Rim, Khumaini, Khabib, Kim, Hye-Lee, Kwon, Jun Hyuck, Kim, Minsu, Cho, Byungchul, Park, Sangjoon, Lee, Won-Jun

Volltext

Atomic Layer Etching of Al2O3 Using F Radical and Al Precursors: Surface Reaction and Reaction Mechanism Study von Kim, Yewon, Cho, Gyejun, Kim, Okhyeon, Choi, Ye Rim, Khumaini, Khabib, Kim, Hye-Lee, Kwon, Jun Hyuck, Kim, Minsu, Cho, Byungchul, Park, Sangjoon, Lee, Won-Jun

Volltext

METHOD OF FORMING GERMANIUM ANTIMONY TELLURIUM FILM von AHN, Dongho, GU, Donggeon, PARK, Changyup, KIM, Yewon, LEE, Won-Jun, KIM, Kwonyoung, KIM, Okhyeon

Volltext bestellen

GAIT-CKD (Gait Analysis using Artificial Intelligence for digital Therapeutics of patients with Chronic Kidney Disease): design and methods von Song, Youngjin, Jeong, In Cheol, Ryu, Semin, Lee, Sunghan, Koh, Jeonghwan, Jeong, Seokjue, Park, Seongmin, Kim, Munsang, Lee, Wonjun, Rye, Okhyeon, Kim, Yeojin, Lee, Sanggyu, Ahn, Mooeob, Kim, Hyunsuk

Volltext