Determination of optimum deposition conditions amorphous silicon thin films von Strunin, V I, Khudaibergenov, G Zh

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The method of the research of residual gases in a tight case of quartz resonators von Belousov, K A, Strunin, V I, Khudaibergenov, G Zh

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Numerical study of nitrogen bulk dissociation in DC magnetron discharge in Ar+N 2 mixture von Strunin, V I, Lyakhov, A A, Khudaibergenov, G Zh

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Numerical study of nitrogen bulk dissociation in DC magnetron discharge in Ar+N2 mixture von Strunin, V I, Lyakhov, A A, Khudaibergenov, G Zh

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Kinetics of an RF low-pressure discharge with a condensed phase von Strunin, V. I., Lyakhov, A. A., Khudaibergenov, G. Zh, Shkurkin, V. V.

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