Atomic Layer Deposited Molybdenum Oxide for the Hole-selective Contact of Silicon Solar Cells von Bivour, Martin, Macco, Bart, Temmler, Jan, Kessels, W.M.M. (Erwin), Hermle, Martin

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Advanced process technologies: Plasma, direct-write, atmospheric pressure, and roll-to-roll ALD von (Erwin) Kessels, W.M.M., Putkonen, Matti

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On the role of nanoporosity in controlling the performance of moisture permeation barrier layers von Perrotta, Alberto, van Beekum, Erik R.J., Aresta, Gianfranco, Jagia, Anu, Keuning, Wytze, van de Sanden, Richard M.C.M., Kessels, Erwin W.M.M., Creatore, Mariadriana

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Revisiting the growth mechanism of atomic layer deposition of Al2O3: A vibrational sum-frequency generation study von Vandalon, Vincent, Kessels, W. M. M. (Erwin)

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Initial Growth Study of Atomic-Layer Deposition of Al2O3 by Vibrational Sum-Frequency Generation von Vandalon, V, Kessels, W. M. M. Erwin

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Investigation of crystalline silicon surface passivation by positively charged POx/Al2O3 stacks von Black, Lachlan E., Kessels, W.M.M. (Erwin)

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Self-aligned local contact opening and n+ diffusion by single-step laser doping from POx/Al2O3 passivation stacks von Black, Lachlan E., Ernst, Marco, Theeuwes, Roel, Melskens, Jimmy, Macdonald, Daniel, Kessels, W.M.M.(Erwin)

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The impact of the nano-pore filling on the performance of organosilicon-based moisture barriers von Perrotta, Alberto, Aresta, Gianfranco, van Beekum, Erik R.J., Palmans, Jurgen, van de Weijer, Peter, van de Sanden, M.C.M. Richard, Kessels, W.M.M. Erwin, Creatore, Mariadriana

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Supplementary Material von Deijkers, J.H. (Sanne), Thepass, H., Verheijen, Marcel, Sprey, Hessel, Maes, Jan Willem, Kessels, W.M.M. (Erwin), Mackus, Adriaan

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Supplementary Material von Deijkers, J.H. (Sanne), Thepass, H., Verheijen, Marcel, Sprey, Hessel, Maes, Jan Willem, Kessels, W.M.M. (Erwin), Mackus, Adriaan

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History of atomic layer deposition and its relationship with the American Vacuum Society von Parsons, Gregory N., Elam, Jeffrey W., George, Steven M., Haukka, Suvi, Jeon, Hyeongtag, (Erwin) Kessels, W. M. M., Leskelä, Markku, Poodt, Paul, Ritala, Mikko, Rossnagel, Steven M.

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