An Electrothermal Tip-Tilt-Piston Micromirror Based on Folded Dual S-Shaped Bimorphs von Kemiao Jia, Pal, S., Huikai Xie

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A Low-Power Low-Noise Dual-Chopper Amplifier for Capacitive CMOS-MEMS Accelerometers von Hongzhi Sun, Deyou Fang, Kemiao Jia, Maarouf, Fares, Hongwei Qu, Huikai Xie

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High-Fill-Factor Micromirror Array With Hidden Bimorph Actuators and Tip-Tilt-Piston Capability von Kemiao Jia, Samuelson, S R, Huikai Xie

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A CMOS-MEMS Gyroscope Interface Circuit Design With High Gain and Low Temperature Dependence von Hongzhi Sun, Kemiao Jia, Xuesong Liu, Guizhen Yan, Yu-Wen Hsu, Fox, R. M., Huikai Xie

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Silicon-on-insulator-based optical demultiplexer employing turning-mirror-integrated arrayed-waveguide grating von Kemiao Jia, Kemiao Jia, Wenhui Wang, Wenhui Wang, Yanzhe Tang, Yanzhe Tang, Yirong Yang, Yirong Yang, Jianyi Yang, Jianyi Yang, Xiaoqing Jiang, Xiaoqing Jiang, Yaming Wu, Yaming Wu, Minghua Wang, Minghua Wang, Yuelin Wang, Yuelin Wang

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A piezoelectric unimorph actuator based tip-tilt-piston micromirror with high fill factor and small tilt and lateral shift von Zhu, Yiping, Liu, Wenjing, Jia, Kemiao, Liao, Wenjun, Xie, Huikai

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A tip–tilt–piston micromirror with a double S-shaped unimorph piezoelectric actuator von Liu, Wenjing, Zhu, Yiping, Jia, Kemiao, Liao, Wenjun, Tang, Yongming, Wang, Baoping, Xie, Huikai

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A monolithic inertial measurement unit fabricated with improved DRIE post-CMOS process von Hongzhi Sun, Kemiao Jia, Yingtao Ding, Zhongyang Guo, Xuesong Liu, Guizhen Yan, Huikai Xie

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Turning-Mirror-Integrated Arrayed-Waveguide Gratings on Silicon-on-Insulator von Jia, Kemiao, Yang, Jianyi, Hao, Yinlei, Jiang, Xiaoqing, Wang, Minghua, Wang, Wenhui, Wu, Yaming, Wang, Yuelin

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A low temperature-dependence gain-boosting front-end amplifier for CMOS-MEMS gyroscopes von Hongzhi Sun, Kemiao Jia, Xuesong Liu, Guizhen Yan, Yu-Wen Hsu, Huikai Xie

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Laser beam control in a LIDAR system von Jia, Kemiao

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A tipatiltapiston micromirror with a double S-shaped unimorph piezoelectric actuator von Liu, Wenjing, Zhu, Yiping, Jia, Kemiao, Liao, Wenjun, Tang, Yongming, Wang, Baoping, Xie, Huikai

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An Electrothermal TipaTiltaPiston Micromirror Based on Folded Dual S-Shaped Bimorphs von Jia, Kemiao, Pal, S, Xie, Huikai

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LASER BEAM CONTROL IN A LIDAR SYSTEM von Jia, Kemiao

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Multiple sense axis MEMS gyroscope having a single drive mode von JIA, Kemiao

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Single-wafer solution and optical phased array application of micro-mirror arrays with high fill factor and large sub-apertures von Kemiao Jia, Samuelson, Sean R, Huikai Xie

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Active lateral force stiction self-recovery for microelectromechanical systems devices von Jones, Peter T, Jia, Kemiao

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Accelerometer with translational motion of masses von Zhang, Xin, Jia, Kemiao, Judy, Michael

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Multi-axis integrated CMOS-MEMS inertial sensors von Huikai Xie, Hongzhi Sun, Kemiao Jia, Deyou Fang, Hongwei Qu

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Multiple sense axis MEMS gyroscope having a single drive mode von JIA KEMIAO

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