Improved fabrication of micro air-channels by incorporation of a structural barrier von Joseph, Paul Jayachandran, Kelleher, Hollie A, Allen, Sue Ann Bidstrup, Kohl, Paul A

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Hydrophobic/hydrophilic surface modification within buried air channels von Salas-Vernis, Jose Luis, Jayachandran, Joseph Paul, Park, Seongho, Kelleher, Hollie A., Bidstrup Allen, Sue Ann, Kohl, Paul A.

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FABRICATION OF SEMICONDUCTOR DEVICES WITH AIR GAPS FOR ULTRA LOW CAPACITANCE INTERCONNECTION STRUCTURES von KOHL, PAUL, ALBERT, BHUSARI, DHANANJAY, M, KELLEHER, HOLLIE ANN, HENDERSON, CLIFFORD, LEE, ALLEN, SUE, ANN, BIDSTRUP

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FABRICATION OF SEMICONDUCTOR DEVICES WITH AIR GAPS FOR ULTRA LOW CAPACITANCE INTERCONNECTION STRUCTURES von KOHL, PAUL, ALBERT, BHUSARI, DHANANJAY, M, KELLEHER, HOLLIE ANN, HENDERSON, CLIFFORD, LEE, ALLEN, SUE, ANN, BIDSTRUP

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