Co-W nanocrystalline electrodeposits as barrier for interconnects von Tsyntsaru, N., Kaziukaitis, G., Yang, C., Cesiulis, H., Philipsen, H. G. G., Lelis, M., Celis, J.-P.

Volltext

Co-W nanocrystalline electrodeposits as barrier for interconnects von Tsyntsaru, N, Kaziukaitis, G, Yang, C, Cesiulis, H, Philipsen, H.G.G, Lelis, M, Celis, Jean-Pierre

Volltext