Physics-guided neural networks for feedforward control with input-to-state-stability guarantees von Bolderman, Max, Butler, Hans, Koekebakker, Sjirk, van Horssen, Eelco, Kamidi, Ramidin, Spaan-Burke, Theresa, Strijbosch, Nard, Lazar, Mircea

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METHOD TO GENERATE AN ACCELERATION SETPOINT PROFILE FOR A MOVABLE OBJECT, SETPOINT GENERATOR AND LITHOGRAPHIC APPARATUS von KAMIDI, Ramidin, BUTLER, Hans

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Active Compensation of Position Dependent Flexible Dynamics in High-Precision Mechatronics von Broens, Yorick, Butler, Hans, Kamidi, Ramidin, Verkerk, Koen, Weiland, Siep

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METHOD TO GENERATE AN ACCELERATION SETPOINT PROFILE FOR A MOVABLE OBJECT, SETPOINT GENERATOR AND LITHOGRAPHIC APPARATUS von BUTLER, Hans, KAMIDI, Ramidin, Izair

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Active Compensation of Position Dependent Flexible Dynamics in High-Precision Mechatronics von Broens, Yorick, Butler, Hans, Kamidi, Ramidin, Verkerk, Koen, Weiland, Siep

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Physics-guided neural networks for feedforward control with input-to-state stability guarantees von Bolderman, Max, Butler, Hans, Koekebakker, Sjirk, Eelco van Horssen, Kamidi, Ramidin, Spaan-Burke, Theresa, Nard Strijbosch, Lazar, Mircea

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METHOD OF CONTROLLING A POSITION OF A FIRST OBJECT RELATIVE TO A SECOND OBJECT, CONTROL UNIT, STAGE APPARATUS AND LITHOGRAPHIC APPARATUS von KAMIDI, Ramidin, KOENEN, Willem, VAN KEULEN, Thijs, COX, Hendrikus

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Method of controlling a position of a first object relative to a second object, control unit, lithographic apparatus and apparatus von Koenen, Willem Herman Gertruda Anna, Van Keulen, Thijs Adriaan Cornelis, Kamidi, Ramidin Izair, Cox, Hendrikus Herman Marie

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METHOD OF CONTROLLING A POSITION OF A FIRST OBJECT RELATIVE TO A SECOND OBJECT, CONTROL UNIT, LITHOGRAPHIC APPARATUS AND APPARATUS von VAN KEULEN, Thijs Adriaan Cornelis, KOENEN, Willem Herman Gertruda Anna, KAMIDI, Ramidin Izair, COX, Hendrikus

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Object positioning in lithography von Kasemsinsup, Yanin, Kamidi, Ramidin Izair, Butler, Hans

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OBJECT POSITIONING IN LITHOGRAPHY von KASEMSINSUP Yanin, BUTLER Hans, KAMIDI Ramidin Izair

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OBJECT POSITIONING IN LITHOGRAPHY von KAMIDI, RAMIDIN, IZAIR, KASEMSINSUP, YANIN, BUTLER, HANS

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OBJECT POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS, OBJECT POSITIONING METHOD AND DEVICE MANUFACTURING METHOD von BUTLER HANS, KAMIDI RAMIDIN IZAIR, KASEMSINSUP YANIN

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Lithographic apparatus, substrate support system, device manufacturing method and control program von Kamidi Ramidin Izair, Aangenent Wilhelmus Henricus Theodorus Maria, Manssouri Khalid, Van De Wal Marinus Maria Johannes

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Data-based feed-forward control in MIMO motion systems von Baggen, M., Heertjes, M., Kamidi, R.

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Object positioning system, control system, lithographic apparatus, object positioning method and device manufacturing method von Dirkx Nic Jasper, Kamidi Ramidin Izair, Aangenent Wilhelmus Henricus Theodorus Maria, Simons Wilhelmus Franciscus Johannes, Butler Hans

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Object positioning system, lithographic apparatus, object positioning method and device manufacturing method von KASEMSINSUP, YANIN, BUTLER, HANS, KAMIDI, RAMIDIN IZAIR

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OBJECT POSITIONING SYSTEM, CONTROL SYSTEM, LITHOGRAPHIC APPARATUS, OBJECT POSITIONING METHOD AND DEVICE MANUFACTURING METHOD von DIRKX Nic Jasper, BUTLER Hans, AANGENENT Wilhelmus Henricus Theodorus Maria, KAMIDI Ramidin Izair, SIMONS Wilhelmus Franciscus Johannes

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Object positioning system, control system, lithographic apparatus, object positioning method and device manufacturing method von NIC DIRKX, RAMIDIN KAMIDI, WILHELMUS HENRICUS THEODORUS MARIA AANGENENT, WILHELMUS FRANCISCUS JOHANNES SIMONS, HANS BUTLER

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Method for controlling position of first object relative to second object, control unit, stage device and lithographic apparatus von COX HENDRIKUS HERMAN MARIE, KAMIDI RAMIDIN IZAIR, VAN KEULEN, THEODORUS, A., C, KOENEN WILLEM HERMAN GERTRUDA ANNA

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