Characterization of TiAlSiON coatings deposited by plasma enhanced magnetron sputtering: XRD, XPS, and DFT studies von Kamenetskih, A.S., Kukharenko, A.I., Kurmaev, E.Z., Skorikov, N.A., Gavrilov, N.V., Cholakh, S.O., Chukin, A.V., Zainullina, V.M., Korotin, M.A.

Volltext