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  1. 1
    HIGH-PRECISION PRESSURE SENSOR BASED ON NANO- AND MICROELECTROMECHANICAL SYSTEM

    HIGH-PRECISION PRESSURE SENSOR BASED ON NANO- AND MICROELECTROMECHANICAL SYSTEM von KALMYKOVA MARIJA ALEKSANDROVNA, VASIL'EV VALERIJ ANATOL'EVICH

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  2. 2
    THERMALLY STABLE PRESSURE SENSOR BASED ON NANO-AND MICRO-ELECTROMECHANICAL SYSTEM WITH MEMBRANE HAVING RIGID CENTRE

    THERMALLY STABLE PRESSURE SENSOR BASED ON NANO-AND MICRO-ELECTROMECHANICAL SYSTEM WITH MEMBRANE HAVING RIGID CENTRE von Vasilev Valerij Anatolevich, Belozubova Nina Evgenevna, Kalmykova Marija Aleksandrovna, Belozubov Evgenij Mikhajlovich

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