Record Capacitance Density from Three-Dimensional Silicon-Based Capacitor: Toward Effective on-Chip Energy Storage von Strambini, Lucanos, Paghi, Alessandro, Mariani, Stefano, Sood, Anjali, Kalliomaki, Jess, Jarvinen, Paivi, Toia, Fabrizio Fausto Renzo, Scurati, Mario, Morelli, Marco, Lamperti, Alessio, Barillaro, Giuseppe

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