Reducing stiction in microelectromechanical systems by rough nanometer-scale films grown by atomic layer deposition von Puurunen, R.L., Häärä, A., Saloniemi, H., Dekker, J., Kainlauri, M., Pohjonen, H., Suni, T., Kiihamäki, J., Santala, E., Leskelä, M., Kattelus, H.

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Reducing stiction in Microelectromechanical Systems by nanometer-scale films grown by atomic layer deposition von Puurunen, R. L., Haara, A., Ritala, H., Dekker, J., Kainlauri, M., Pohjonen, H., Suni, T., Kiihamaki, J., Santala, E., Leskela, M., Kattelus, H.

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Photo-thermal chemical vapor deposition of graphene on copper von Riikonen, Juha, Kim, Wonjae, Li, Changfeng, Svensk, Olli, Arpiainen, Sanna, Kainlauri, Markku, Lipsanen, Harri

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Electrical transport through ordered self-assembled protein monolayer measured by constant force conductive atomic force microscopy von Kivioja, Jani M., Kurppa, Katri, Kainlauri, Markku, Linder, Markus B., Ahopelto, Jouni

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