Synthesis of PECVD a-SiCXNY:H membranes as molecular sieves for small gas separation von Kafrouni, Wassim, Rouessac, Vincent, Julbe, Anne, Durand, Jean

Volltext

Synthesis and characterization of silicon carbonitride films by plasma enhanced chemical vapor deposition (PECVD) using bis(dimethylamino)dimethylsilane (BDMADMS), as membrane for... von Kafrouni, W., Rouessac, V., Julbe, A., Durand, J.

Volltext

Second harmony generation behavior in fully epitaxial m-plane (1 0 −1 0) non-polar ZnO thin film grown on MgO (1 0 0) substrate by radio frequency sputtering von Kafrouni, Wassim, Vigne, Sébastien, Ge, Jun, Margot, Joëlle, Chaker, Mohamed

Volltext

Parametric study of STiGer etching process in order to reduce extended formation of scalloping defects on the sidewalls of silicon submicron trenches von Kafrouni, W., Tillocher, T., Ladroue, J., Lefaucheux, P., Boufnichel, M., Ranson, P., Dussart, R.

Volltext

Optimization of submicron deep trench profiles with the STiGer cryoetching process: reduction of defects von Tillocher, T, Kafrouni, W, Ladroue, J, Lefaucheux, P, Boufnichel, M, Ranson, P, Dussart, R

Volltext

Synthesis of PECVD a-SiC X N Y :H membranes as molecular sieves for small gas separation von Kafrouni, Wassim, Rouessac, Vincent, Julbe, Anne, Durand, Jean

Volltext