Integration of (Poly‐Si/Air)n Distributed Bragg Reflectors in a 150 mm Bulk Micromachined Wafer‐Level MOEMS Fabrication Process von Helke, Christian, Seiler, Jan, Meinig, Marco, Großmann, Toni Dirk, Bonitz, Jens, Haase, Micha, Zimmermann, Sven, Ebermann, Martin, Kurth, Steffen, Reuter, Danny, Hiller, Karla

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Integration of (Poly‐Si/Air)n Distributed Bragg Reflectors in a 150mm Bulk Micromachined Wafer‐Level MOEMS Fabrication Process von Helke, Christian, Seiler, Jan, Meinig, Marco, Großmann, Toni Dirk, Bonitz, Jens, Haase, Micha, Zimmermann, Sven, Ebermann, Martin, Kurth, Steffen, Reuter, Danny, Hiller, Karla

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Determination of Parameters With Uncertainties for Quality Control in MEMS Fabrication von Gennat, M., Meinig, M., Shaporin, A., Kurth, S., Rembe, C., Tibken, B.

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Reflection based Strain Sensing using Metamaterials von Großmann, Toni Dirk, Decker, Ricardo, Kurth, Steffen, Kroll, Lothar, Otto, Thomas

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Design, fabrication and characterization of MEMS probe card for fine pitch IC testing von Yuan, Tao, Chen, Di, Chen, Jingdong, Fu, Hualin, Kurth, Steffen, Otto, Thomas, Gessner, Thomas

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Integrated Microsystems for Smart Applications von Otto, Thomas, Kurth, Steffen, Voigt, Sven, Morschhauser, Andreas, Meinig, Marco, Hiller, Karla, Martin, Joerg, Vogel, Martina

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Silicon mirrors and micromirror arrays for spatial laser beam modulation von Kurth, Steffen, Hahn, Ramon, Kaufmann, Christian, Kehr, Kersten, Mehner, Jan, Wollmann, Udo, Dötzel, Wolfram, Gessner, Thomas

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Realisation of Sensitive Functionality by the Integration of Electromagnetic Resonators in Composite Materials von Großmann, Toni Dirk, Hartwig, Melinda, Heinrich, Michael, Decker, Ricardo, Symmank, Christina, Schmidt, Anja, Kurth, Steffen, Götze, Uwe, Baumann, Reinhard R., Kroll, Lothar, Otto, Thomas

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(Invited) Smart Monitoring Systems for a Green Future von Saupe, Ray, Stock, Volker, Otto, Thomas, Kurth, Steffen, Hiller, Karla, Meinig, Marco, Neumann, Norbert, Gessner, Thomas

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Analysis of Au metal–metal contacts in a lateral actuated RF MEMS switch von Gaitzsch, Markus, Kurth, Steffen, Voigt, Sven, Haas, Sven, Gessner, Thomas

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Subwavelength Grating Reflectors for Fabrication Cost Reduction of Fabry-Perot Infrared Filters von Rupprecht, Julia, Kurth, Steffen, Hiller, Karla, Seifert, Mario, Besser, Jan, Meinig, Marco, Ebermann, Martin, Neumann, Norbert, Gessner, Thomas

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Uncooled IR sensors with tunable MEMS Fabry-Pérot filters for the long-wave infrared range von Neumann, Norbert, Ebermann, Martin, Gittler, Elvira, Meinig, Marco, Kurth, Steffen, Hiller, Karla

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Continuously tunable RF-MEMS varactor for high power applications von Leidich, Stefan, Kurth, Steffen, Gessner, Thomas

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24 GHz RF-MEMS Phase Shifter with Non-Galvanic Electromagnetic Coupling Fabricated in Silicon-Bulk Technology von Voigt, Sebastian, Leidich, Stefan, Doetzel, Wolfram, Kurth, Steffen, Gessner, Thomas

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A new vacuum friction gauge based on a Si tuning fork von Kurth, Steffen, Hiller, Karla, Mehner, Jan, Dötzel, Wolfram, Gessner, Thomas, Iwert, Thomas, Biehl, Steffen

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Experimental adaptation of model parameters for microelectromechanical systems (MEMS) von Kurth, S., Dötzel, W.

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MICROELECTROMECHANICAL SWITCH AND METHOD FOR MANUFACTURING THE SAME von VOIGT, Sven, HAAS, Sven, AKIRA, Akiba, IKEDA, Koichi, KURTH, Steffen

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MICROELECTROMECHANICAL SYSTEM AND METHOD FOR MANUFACTURING THE SAME von VOIGT, Sven, HAAS, Sven, AKIRA, Akiba, IKEDA, Koichi, KURTH, Steffen

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MICROELECTROMECHANICAL SWITCH AND METHOD FOR MANUFACTURING THE SAME von VOIGT, Sven, HAAS, Sven, AKIRA, Akiba, IKEDA, Koichi, KURTH, Steffen

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MICROELECTROMECHANICAL SYSTEM AND METHOD FOR MANUFACTURING THE SAME von VOIGT, Sven, HAAS, Sven, AKIRA, Akiba, IKEDA, Koichi, KURTH, Steffen

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