METHOD FOR FORMING A TEMPLATE ON A SILICON SUBSTRATE, AND LIGHT-RADIATING DEVICE von LUK`JANOV, ANDREJ VITAL`EVICH, BESSOLOV, VASILIY NIKOLAEVICH, OSIPOV, ANDREJ VIKTOROVICH, KONENKOVA, ELENA VASIL`EVNA, KUKUSHKIN, SERGEJ ARSEN`EVICH

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