2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride von Meinel, Katja, Melzer, Marcel, Stoeckel, Chris, Shaporin, Alexey, Forke, Roman, Zimmermann, Sven, Hiller, Karla, Otto, Thomas, Kuhn, Harald

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Metamodeling: Applications and Trajectories to the Future: Essays in Honor of Dimitris Karagiannis von Fill, Hans-Georg, Kuhn, Harald

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Perspective on the Development and Integration of Hydrogen Sensors for Fuel Cell Control von Hauck, Michael, Bickmann, Christopher, Morgenstern, Annika, Nagel, Nicolas, Meinecke, Christoph R., Schade, Alexander, Tafat, Rania, Viriato, Lucas, Kuhn, Harald, Salvan, Georgeta, Schondelmaier, Daniel, Ullrich, Tino, Unwerth, Thomas von, Streif, Stefan

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About the Data Analysis of Optical Emission Spectra of Reactive Ion Etching Processes—The Method of Spectral Redundancy Reduction von Haase, Micha, Sayyed, Mudassir Ali, Langer, Jan, Reuter, Danny, Kuhn, Harald

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Paradigm Changing Integration Technology for the Production of Flexible Electronics by Transferring Structures, Dies and Electrical Components from Rigid to Flexible Substrates von Selbmann, Franz, Paul, Soumya Deep, Satwara, Maulik, Roscher, Frank, Wiemer, Maik, Kuhn, Harald, Joseph, Yvonne

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Localized Induction Heating of Cu-Sn Layers for Rapid Solid-Liquid Interdiffusion Bonding Based on Miniaturized Coils von Hofmann, Christian, Satwara, Maulik, Kroll, Martin, Panhale, Sushant, Rochala, Patrick, Wiemer, Maik, Hiller, Karla, Kuhn, Harald

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Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors von Stoeckel, Chris, Meinel, Katja, Melzer, Marcel, Žukauskaitė, Agnė, Zimmermann, Sven, Forke, Roman, Hiller, Karla, Kuhn, Harald

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Investigation of biocompatible Parylene as triboelectric layer for wearable energy harvesting von Selbmann, Franz, Baum, Mario, Bobinger, Marco, Gottwald, Markus, Wiemer, Maik, Kuhn, Harald

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CNT-PUFs: Highly Robust and Heat-Tolerant Carbon-Nanotube-Based Physical Unclonable Functions von Frank, Florian, Böttger, Simon, Mexis, Nico, Anagnostopoulos, Nikolaos Athanasios, Mohamed, Ali, Hartmann, Martin, Kuhn, Harald, Helke, Christian, Arul, Tolga, Katzenbeisser, Stefan, Hermann, Sascha

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Distribution and Localization of Hydrophobic and Ionic Chemical Groups at the Surface of Bleached Human Hair Fibers von Korte, Michael, Akari, Sabri, Kühn, Harald, Baghdadli, Nawel, Möhwald, Helmuth, Luengo, Gustavo S

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Inductive Heating Based on VHF-ISM Radio Band Frequencies as Technology Platform for Efficient Heating of Metallic Micro-Scaled Bonding Layers in MEMS Packaging von Hofmann, Christian, Kroll, Martin, Panhale, Sushant, Wiemer, Maik, Kunke, Andreas, Hiller, Karla, Kuhn, Harald

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Digital Adaptive Driving Strategies for High-Voltage IGBTs von Lan Dang, Kuhn, Harald, Mertens, Axel

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Plastic Waste RecyclingA Chemical Recycling Perspective von Schade, Alexander, Melzer, Marcel, Zimmermann, Sven, Schwarz, Thomas, Stoewe, Klaus, Kuhn, Harald

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A Mechanical–Electrical Model to Describe the Negative Differential Resistance in Membranotronic Devices von Huber, Max, Schuster, Jörg, Schmidt, Oliver G., Kuhn, Harald, Karnaushenko, Daniil

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A Mechanical–Electrical Model to Describe the Negative Differential Resistance in Membranotronic Devices von Huber, Max, Schuster, Jörg, Schmidt, Oliver G., Kuhn, Harald, Karnaushenko, Daniil

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Hot Embossing to Fabricate Parylene-Based Microstructures and Its Impact on the Material Properties von Glauche, Florian, Selbmann, Franz, Guttmann, Markus, Schneider, Marc, Hengsbach, Stefan, Joseph, Yvonne, Kuhn, Harald

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Bridging the gap: Perspectives of nanofabrication technologies for application-oriented research von Baum, Mario, Meinecke, Christoph, Blaudeck, Thomas, Helke, Christian, Reuter, Danny, Hiller, Karla, Hermann, Sascha, Schulz, Stefan E., Kuhn, Harald

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Impact of Non-Accelerated Aging on the Properties of Parylene C von Selbmann, Franz, Scherf, Christina, Langenickel, Jörn, Roscher, Frank, Wiemer, Maik, Kuhn, Harald, Joseph, Yvonne

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Low-Temperature Parylene-Based Adhesive Bonding Technology for 150 and 200 mm Wafers for Fully Biocompatible and Highly Reliable Microsystems von Selbmann, Franz, Baum, Mario, Meinecke, Christoph, Wiemer, Maik, Kuhn, Harald, Joseph, Yvonne

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Prozessmanagement fur Experten: Impulse fur aktuelle und wiederkehrende Themen von Bayer, Franz, Kuhn, Harald

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